Abstract
Improving the design and operation of semiconductor manufacturing facilities typically requires the application and integration of results derived from a range of related factory models. The Semiconductor Workbench for Integrated Modeling (SWIM) is an innovative software system that simplifies the task of working with multiple models. This paper describes research and development leading to the incorporation of model optimization features with the SWIM framework.
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings of the IEEE International Conference on Systems, Man and Cybernetics |
| Publisher | IEEE |
| Pages | 221-226 |
| Number of pages | 6 |
| Volume | 1 |
| State | Published - 1994 |
| Externally published | Yes |
| Event | Proceedings of the 1994 IEEE International Conference on Systems, Man and Cybernetics. Part 1 (of 3) - San Antonio, TX, USA Duration: Oct 2 1994 → Oct 5 1994 |
Other
| Other | Proceedings of the 1994 IEEE International Conference on Systems, Man and Cybernetics. Part 1 (of 3) |
|---|---|
| City | San Antonio, TX, USA |
| Period | 10/2/94 → 10/5/94 |
ASJC Scopus subject areas
- Hardware and Architecture
- Control and Systems Engineering