Multi-model optimization in SWIM

K. Preston White, John Fowler

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Improving the design and operation of semiconductor manufacturing facilities typically requires the application and integration of results derived from a range of related factory models. The Semiconductor Workbench for Integrated Modeling (SWIM) is an innovative software system that simplifies the task of working with multiple models. This paper describes research and development leading to the incorporation of model optimization features with the SWIM framework.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE International Conference on Systems, Man and Cybernetics
PublisherIEEE
Pages221-226
Number of pages6
Volume1
StatePublished - 1994
Externally publishedYes
EventProceedings of the 1994 IEEE International Conference on Systems, Man and Cybernetics. Part 1 (of 3) - San Antonio, TX, USA
Duration: Oct 2 1994Oct 5 1994

Other

OtherProceedings of the 1994 IEEE International Conference on Systems, Man and Cybernetics. Part 1 (of 3)
CitySan Antonio, TX, USA
Period10/2/9410/5/94

Fingerprint

Semiconductor materials
Industrial plants

ASJC Scopus subject areas

  • Hardware and Architecture
  • Control and Systems Engineering

Cite this

White, K. P., & Fowler, J. (1994). Multi-model optimization in SWIM. In Proceedings of the IEEE International Conference on Systems, Man and Cybernetics (Vol. 1, pp. 221-226). IEEE.

Multi-model optimization in SWIM. / White, K. Preston; Fowler, John.

Proceedings of the IEEE International Conference on Systems, Man and Cybernetics. Vol. 1 IEEE, 1994. p. 221-226.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

White, KP & Fowler, J 1994, Multi-model optimization in SWIM. in Proceedings of the IEEE International Conference on Systems, Man and Cybernetics. vol. 1, IEEE, pp. 221-226, Proceedings of the 1994 IEEE International Conference on Systems, Man and Cybernetics. Part 1 (of 3), San Antonio, TX, USA, 10/2/94.
White KP, Fowler J. Multi-model optimization in SWIM. In Proceedings of the IEEE International Conference on Systems, Man and Cybernetics. Vol. 1. IEEE. 1994. p. 221-226
White, K. Preston ; Fowler, John. / Multi-model optimization in SWIM. Proceedings of the IEEE International Conference on Systems, Man and Cybernetics. Vol. 1 IEEE, 1994. pp. 221-226
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