Multi-level pseudo-random signal design and `model-on-demand' estimation applied to nonlinear identification of a RTP wafer reactor

M. W. Braun, Daniel Rivera, A. Stenman, W. Foslien, C. Hrenya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

33 Scopus citations

Fingerprint Dive into the research topics of 'Multi-level pseudo-random signal design and `model-on-demand' estimation applied to nonlinear identification of a RTP wafer reactor'. Together they form a unique fingerprint.

Engineering & Materials Science