Multi-level pseudo-random signal design and `model-on-demand' estimation applied to nonlinear identification of a RTP wafer reactor

M. W. Braun, Daniel Rivera, A. Stenman, W. Foslien, C. Hrenya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

33 Scopus citations

Abstract

Guidelines are presented for specifying the design parameters of multi-level pseudo-random sequences in a manner useful for `plant-friendly' nonlinear system identification. These multi-level signals are introduced into a Rapid Thermal Processing wafer reactor simulation and compared against a well-designed pseudo-random binary sequence (PRBS). The resulting data serves as a database for a `Model on Demand' (MoD) predictor. MoD estimation is attractive because it requires less engineering effort to model a nonlinear plant, compared to global nonlinear models such as neural networks. The improved fit of multi-level signals over the PRBS signal, as well as the usefulness of the MoD estimator, is demonstrated on validation data.

Original languageEnglish (US)
Title of host publicationProceedings of the American Control Conference
PublisherIEEE
Pages1573-1577
Number of pages5
Volume3
StatePublished - 1999
EventProceedings of the 1999 American Control Conference (99ACC) - San Diego, CA, USA
Duration: Jun 2 1999Jun 4 1999

Other

OtherProceedings of the 1999 American Control Conference (99ACC)
CitySan Diego, CA, USA
Period6/2/996/4/99

ASJC Scopus subject areas

  • Control and Systems Engineering

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