Morphological and optical properties of silicon nanostructure imbedded in silica and silicon nitride films grown by single source chemical vapor deposition (CVD) were analyzed. Growth reactions of the single source precursors in a ultrahigh vacuum (UHV)-CVD reactor yielded amorphous films. Room temperature photoluminescence (PL) studies showed that nanocrystals emit light in visible spectral region between 580 and 650 nm.
ASJC Scopus subject areas
- Physics and Astronomy(all)