MONTE CARLO STUDY OF Si(111) SURFACE OXIDATION.

S. E. Goodnick; W. Porod; Robert Oscar Grondin; S. M. Goodnick; C. W. Wilmsen; David K Ferry

doi:10.1116/1.582689

MONTE CARLO STUDY OF Si(111) SURFACE OXIDATION.

S. E. Goodnick, W. Porod, Robert Oscar Grondin, S. M. Goodnick, C. W. Wilmsen, David K Ferry

Electrical Engineering

Research output: Contribution to journal › Conference article › peer-review

Abstract

A theoretical study of the initial oxidation stages of Si(111) surfaces is undertaken. A Monte Carlo simulation is used to study the individual surface processes that have been suggested in the literature. The relative importance of these mechanisms for the chemical composition of the oxide layer as well as for the initial stages of the formation of SiO//x is investigated.

Original language	English (US)
Pages (from-to)	767-772
Number of pages	6
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	1
Issue number	3
DOIs	https://doi.org/10.1116/1.582689
State	Published - Jan 1 1983
Event	Proc of the Annu Conf on the Phys and Chem of Semicond Interfaces, 10th - Santa Fe, NM, USA Duration: Jan 25 1983 → Jan 27 1983

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1116/1.582689

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title = "MONTE CARLO STUDY OF Si(111) SURFACE OXIDATION.",

abstract = "A theoretical study of the initial oxidation stages of Si(111) surfaces is undertaken. A Monte Carlo simulation is used to study the individual surface processes that have been suggested in the literature. The relative importance of these mechanisms for the chemical composition of the oxide layer as well as for the initial stages of the formation of SiO//x is investigated.",

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AU - Wilmsen, C. W.

AU - Ferry, David K

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AB - A theoretical study of the initial oxidation stages of Si(111) surfaces is undertaken. A Monte Carlo simulation is used to study the individual surface processes that have been suggested in the literature. The relative importance of these mechanisms for the chemical composition of the oxide layer as well as for the initial stages of the formation of SiO//x is investigated.

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Y2 - 25 January 1983 through 27 January 1983

ER -

MONTE CARLO STUDY OF Si(111) SURFACE OXIDATION.

Abstract

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