Monolithically Integrated Inertial Sensors

Gary K. Fedder, Junseok Chae, Khalil Najafi, Tim Denison, Jinbo Kuang, Steve Lewis, Haluk Kulah

Research output: Chapter in Book/Report/Conference proceedingChapter

3 Scopus citations

Abstract

This chapter provides a comprehensive overview of MEMS inertial sensors that are integrated with foundry electronics. A brief summary of micro-accelerometer and gyroscope applications and operation is presented, followed by descriptions of inertial sensors catalogued by the type of structural material. Integrated sensors include those made with structural layers of polysilicon, CMOS metal-dielectric stacks, plated metal and bulk silicon.

Original languageEnglish (US)
Title of host publicationCMOS-MEMS
Subtitle of host publicationAdvanced Micro and Nanosystems
PublisherWiley-VCH Verlag
Pages137-191
Number of pages55
Volume2
ISBN (Electronic)9783527616718
ISBN (Print)9783527310807
DOIs
StatePublished - Feb 29 2008

Keywords

  • Accelerometers
  • Gyroscopes
  • Inertial sensors
  • Integrated CMOS MEMS

ASJC Scopus subject areas

  • Engineering(all)
  • Materials Science(all)

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  • Cite this

    Fedder, G. K., Chae, J., Najafi, K., Denison, T., Kuang, J., Lewis, S., & Kulah, H. (2008). Monolithically Integrated Inertial Sensors. In CMOS-MEMS: Advanced Micro and Nanosystems (Vol. 2, pp. 137-191). Wiley-VCH Verlag. https://doi.org/10.1002/9783527616718.ch3