Monolithically Integrated Inertial Sensors

Gary K. Fedder; Junseok Chae; Khalil Najafi; Tim Denison; Jinbo Kuang; Steve Lewis; Haluk Kulah

doi:10.1002/9783527616718.ch3

Monolithically Integrated Inertial Sensors

Gary K. Fedder, Junseok Chae, Khalil Najafi, Tim Denison, Jinbo Kuang, Steve Lewis, Haluk Kulah

Research output: Chapter in Book/Report/Conference proceeding › Chapter

4 Scopus citations

Abstract

This chapter provides a comprehensive overview of MEMS inertial sensors that are integrated with foundry electronics. A brief summary of micro-accelerometer and gyroscope applications and operation is presented, followed by descriptions of inertial sensors catalogued by the type of structural material. Integrated sensors include those made with structural layers of polysilicon, CMOS metal-dielectric stacks, plated metal and bulk silicon.

Original language	English (US)
Title of host publication	CMOS-MEMS
Subtitle of host publication	Advanced Micro and Nanosystems
Publisher	Wiley-VCH Verlag
Pages	137-191
Number of pages	55
Volume	2
ISBN (Electronic)	9783527616718
ISBN (Print)	9783527310807
DOIs	https://doi.org/10.1002/9783527616718.ch3
State	Published - Feb 29 2008

Keywords

Accelerometers
Gyroscopes
Inertial sensors
Integrated CMOS MEMS

ASJC Scopus subject areas

General Engineering
General Materials Science

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10.1002/9783527616718.ch3

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abstract = "This chapter provides a comprehensive overview of MEMS inertial sensors that are integrated with foundry electronics. A brief summary of micro-accelerometer and gyroscope applications and operation is presented, followed by descriptions of inertial sensors catalogued by the type of structural material. Integrated sensors include those made with structural layers of polysilicon, CMOS metal-dielectric stacks, plated metal and bulk silicon.",

keywords = "Accelerometers, Gyroscopes, Inertial sensors, Integrated CMOS MEMS",

author = "Fedder, {Gary K.} and Junseok Chae and Khalil Najafi and Tim Denison and Jinbo Kuang and Steve Lewis and Haluk Kulah",

note = "Publisher Copyright: {\textcopyright} 2005 WILEY-VCH Verlag GmbH & Co. KGaA.",

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T1 - Monolithically Integrated Inertial Sensors

AU - Fedder, Gary K.

AU - Chae, Junseok

AU - Najafi, Khalil

AU - Denison, Tim

AU - Kuang, Jinbo

AU - Lewis, Steve

AU - Kulah, Haluk

PY - 2008/2/29

Y1 - 2008/2/29

N2 - This chapter provides a comprehensive overview of MEMS inertial sensors that are integrated with foundry electronics. A brief summary of micro-accelerometer and gyroscope applications and operation is presented, followed by descriptions of inertial sensors catalogued by the type of structural material. Integrated sensors include those made with structural layers of polysilicon, CMOS metal-dielectric stacks, plated metal and bulk silicon.

AB - This chapter provides a comprehensive overview of MEMS inertial sensors that are integrated with foundry electronics. A brief summary of micro-accelerometer and gyroscope applications and operation is presented, followed by descriptions of inertial sensors catalogued by the type of structural material. Integrated sensors include those made with structural layers of polysilicon, CMOS metal-dielectric stacks, plated metal and bulk silicon.

KW - Accelerometers

KW - Gyroscopes

KW - Inertial sensors

KW - Integrated CMOS MEMS

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VL - 2

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BT - CMOS-MEMS

PB - Wiley-VCH Verlag

ER -

Monolithically Integrated Inertial Sensors

Abstract

Keywords

ASJC Scopus subject areas

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