Monitoring and Control of Semiconductor Manufacturing Processes

Suttipan Limanond, Jennie Si, Konstantinos Tsakalis

Research output: Contribution to journalArticle

49 Scopus citations
Original languageEnglish (US)
Pages (from-to)46-58
Number of pages13
JournalIEEE Control Systems
Volume18
Issue number6
DOIs
StatePublished - Dec 1998

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Modeling and Simulation
  • Electrical and Electronic Engineering

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