Monitoring and Control of Semiconductor Manufacturing Processes

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@article{5a02166fe56f4241b46167d910eb059e,

title = "Monitoring and Control of Semiconductor Manufacturing Processes",

author = "Suttipan Limanond and Jennie Si and Konstantinos Tsakalis",

year = "1998",

month = dec,

doi = "10.1109/37.736011",

language = "English (US)",

volume = "18",

pages = "46--58",

journal = "IEEE Control Systems",

issn = "1066-033X",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "6",

}

TY - JOUR

T1 - Monitoring and Control of Semiconductor Manufacturing Processes

AU - Limanond, Suttipan

AU - Si, Jennie

AU - Tsakalis, Konstantinos

PY - 1998/12

Y1 - 1998/12

UR - http://www.scopus.com/inward/record.url?scp=0032288356&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0032288356&partnerID=8YFLogxK

U2 - 10.1109/37.736011

DO - 10.1109/37.736011

M3 - Article

AN - SCOPUS:0032288356

VL - 18

SP - 46

EP - 58

JO - IEEE Control Systems

JF - IEEE Control Systems

SN - 1066-033X

IS - 6

ER -