@article{5a02166fe56f4241b46167d910eb059e,
title = "Monitoring and Control of Semiconductor Manufacturing Processes",
author = "Suttipan Limanond and Jennie Si and Konstantinos Tsakalis",
note = "Funding Information: The authors are all with the Department of Electric41 Engineering, SdERC, Arizona State University, Tempe, Arizona. Limanond{\textquoteright}s and Si{\textquoteright}s research is supported in part by NSF under grant E S-9553202, by E RI under grant RP8015-03, and by Motorola; Tsakalis{\textquoteright}s research is supported in part by SEMY Engineering Inc. underF g rant No. SEI-9 105 15-002.",
year = "1998",
month = dec,
doi = "10.1109/37.736011",
language = "English (US)",
volume = "18",
pages = "46--58",
journal = "IEEE Control Systems",
issn = "1066-033X",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "6",
}