Monitoring and control of semiconductor manufacturing processes

Suttipan Limanond, Jennie Si, Konstantinos Tsakalis

Research output: Contribution to journalArticle

49 Citations (Scopus)
Original languageEnglish (US)
Pages (from-to)46-58
Number of pages13
JournalIEEE Control Systems Magazine
Volume18
Issue number6
DOIs
StatePublished - Dec 1998

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Integrated circuit manufacture
Chemical polishing
VLSI Circuits
Semiconductor Manufacturing
Cost-effectiveness
Chemical Vapor Deposition
VLSI circuits
Etching
Cost effectiveness
Process Control
Lithography
Process control
Chemical vapor deposition
Monitoring
Semiconductor materials

ASJC Scopus subject areas

  • Control and Systems Engineering

Cite this

Monitoring and control of semiconductor manufacturing processes. / Limanond, Suttipan; Si, Jennie; Tsakalis, Konstantinos.

In: IEEE Control Systems Magazine, Vol. 18, No. 6, 12.1998, p. 46-58.

Research output: Contribution to journalArticle

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