| Original language | English (US) |
|---|---|
| Pages (from-to) | 46-58 |
| Number of pages | 13 |
| Journal | IEEE Control Systems Magazine |
| Volume | 18 |
| Issue number | 6 |
| DOIs | |
| State | Published - Dec 1998 |
Fingerprint
Integrated circuit manufacture
Chemical polishing
VLSI Circuits
Semiconductor Manufacturing
Cost-effectiveness
Chemical Vapor Deposition
VLSI circuits
Etching
Cost effectiveness
Process Control
Lithography
Process control
Chemical vapor deposition
Monitoring
Semiconductor materials
ASJC Scopus subject areas
- Control and Systems Engineering
Cite this
Limanond, S., Si, J., & Tsakalis, K. (1998). Monitoring and control of semiconductor manufacturing processes. IEEE Control Systems Magazine, 18(6), 46-58. https://doi.org/10.1109/37.736011
Monitoring and control of semiconductor manufacturing processes. / Limanond, Suttipan; Si, Jennie; Tsakalis, Konstantinos.
In: IEEE Control Systems Magazine, Vol. 18, No. 6, 12.1998, p. 46-58.Research output: Contribution to journal › Article
Limanond, S, Si, J & Tsakalis, K 1998, 'Monitoring and control of semiconductor manufacturing processes', IEEE Control Systems Magazine, vol. 18, no. 6, pp. 46-58. https://doi.org/10.1109/37.736011
Limanond S, Si J, Tsakalis K. Monitoring and control of semiconductor manufacturing processes. IEEE Control Systems Magazine. 1998 Dec;18(6):46-58. https://doi.org/10.1109/37.736011
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