Molecular Electronic Transducer Based Tilting Sensors

Mengbing Liang, Stella Nickerson, Lenore Dai, Hongyu Yu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper introduces a tilting sensor based on Molecular Electronic Transducer (MET) technology. By applying electrical potential between two electrodes covered by lithium iodide electrolyte, the output current from the sensor reflects the covered area of electrodes. The continuously change of electrode area with tilting angle is achieved by patterning metal traces on top of a SiO2 encapsulated silicon wafer. Polydimethylsiloxane (PDMS) is used as the electrolyte chamber which has high bond strength with SiO2 after the surface treatment with O2 plasma. The MET tilting sensor achieves a promising performance with a linear range of ± 90°, resolution of 0.184° and time constant of 40s.

Original languageEnglish (US)
Title of host publication33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages765-768
Number of pages4
ISBN (Electronic)9781728135809
DOIs
StatePublished - Jan 2020
Externally publishedYes
Event33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 - Vancouver, Canada
Duration: Jan 18 2020Jan 22 2020

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2020-January
ISSN (Print)1084-6999

Conference

Conference33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
CountryCanada
CityVancouver
Period1/18/201/22/20

Keywords

  • Molecular Electronic Transducer
  • PDMS
  • Tilt Sensor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Liang, M., Nickerson, S., Dai, L., & Yu, H. (2020). Molecular Electronic Transducer Based Tilting Sensors. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 (pp. 765-768). [9056211] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS46641.2020.9056211