Molecular electronic transducer based planetary seismometer with new fabrication process

Mengbing Liang, Hai Huang, Vadim Agafonov, Rui Tang, Ruirui Han, Hongyu Yu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

15 Scopus citations

Abstract

This paper describes a novel design and implementation of a short period seismometer based on molecular electronic transducer (MET) for the purpose of planetary exploration. A silicon on insulator (SOI)-based micro-fabrication is employed to reduce the hydraulic impedance of microfluidic channels in a MET device, resulting in improved noise floor and sensitivity. The resolution reached 1.78×10-7 (m/s2)/√Hz at 1.2 Hz with the sensitivity of 2500V/(m/s2).

Original languageEnglish (US)
Title of host publicationMEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages986-989
Number of pages4
ISBN (Electronic)9781509019731
DOIs
StatePublished - Feb 26 2016
Event29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
Duration: Jan 24 2016Jan 28 2016

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2016-February
ISSN (Print)1084-6999

Other

Other29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Country/TerritoryChina
CityShanghai
Period1/24/161/28/16

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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