This letter reports a low-frequency micro-accelerometer implementing a liquid-state sensing body, based on molecular electronic transducer (MET) in post-CMOS compatible microfabrication technology. The device employs a sub-microliter electrolyte droplet encapsulated in oil as the sensing body, and a MET electrode configuration as the sensing read-out mechanism. The promising and unique performance of the MET design allows the fabricated device to achieve 10.8 V/G(G=9.81 m/s2) sensitivity at 20 Hz with nearly flat response over the frequency range from 1 to 50 Hz, and a low noise floor of 75 μ G/v Hz at 20 Hz.
- electrolyte droplet
- microelectromechanical systems (MEMS)
- molecular electronic transducer
- post-CMOS compatible
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering