Molecular electronic transducer-based low-frequency accelerometer fabricated with post-cmos compatible process using droplet as sensing body

Hai Huang, Mengbing Liang, Rui Tang, Jonathon Oiler, Hongyu Yu

Research output: Contribution to journalArticlepeer-review

13 Scopus citations

Abstract

This letter reports a low-frequency micro-accelerometer implementing a liquid-state sensing body, based on molecular electronic transducer (MET) in post-CMOS compatible microfabrication technology. The device employs a sub-microliter electrolyte droplet encapsulated in oil as the sensing body, and a MET electrode configuration as the sensing read-out mechanism. The promising and unique performance of the MET design allows the fabricated device to achieve 10.8 V/G(G=9.81 m/s2) sensitivity at 20 Hz with nearly flat response over the frequency range from 1 to 50 Hz, and a low noise floor of 75 μ G/v Hz at 20 Hz.

Original languageEnglish (US)
Article number6587528
Pages (from-to)1304-1306
Number of pages3
JournalIEEE Electron Device Letters
Volume34
Issue number10
DOIs
StatePublished - Sep 2 2013

Keywords

  • Accelerometer
  • electrolyte droplet
  • microelectromechanical systems (MEMS)
  • molecular electronic transducer
  • post-CMOS compatible

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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