Molecular electronic transducer-based low-frequency accelerometer fabricated with post-cmos compatible process using droplet as sensing body

Hai Huang; Mengbing Liang; Rui Tang; Jonathon Oiler; Hongyu Yu

doi:10.1109/LED.2013.2277541

Molecular electronic transducer-based low-frequency accelerometer fabricated with post-cmos compatible process using droplet as sensing body

Hai Huang, Mengbing Liang, Rui Tang, Jonathon Oiler, Hongyu Yu

Research output: Contribution to journal › Article › peer-review

17 Scopus citations

Abstract

This letter reports a low-frequency micro-accelerometer implementing a liquid-state sensing body, based on molecular electronic transducer (MET) in post-CMOS compatible microfabrication technology. The device employs a sub-microliter electrolyte droplet encapsulated in oil as the sensing body, and a MET electrode configuration as the sensing read-out mechanism. The promising and unique performance of the MET design allows the fabricated device to achieve 10.8 V/G(G=9.81 m/s₂) sensitivity at 20 Hz with nearly flat response over the frequency range from 1 to 50 Hz, and a low noise floor of 75 μ G/v Hz at 20 Hz.

Original language	English (US)
Article number	6587528
Pages (from-to)	1304-1306
Number of pages	3
Journal	IEEE Electron Device Letters
Volume	34
Issue number	10
DOIs	https://doi.org/10.1109/LED.2013.2277541
State	Published - 2013

Keywords

Accelerometer
electrolyte droplet
microelectromechanical systems (MEMS)
molecular electronic transducer
post-CMOS compatible

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/LED.2013.2277541

Cite this

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title = "Molecular electronic transducer-based low-frequency accelerometer fabricated with post-cmos compatible process using droplet as sensing body",

abstract = "This letter reports a low-frequency micro-accelerometer implementing a liquid-state sensing body, based on molecular electronic transducer (MET) in post-CMOS compatible microfabrication technology. The device employs a sub-microliter electrolyte droplet encapsulated in oil as the sensing body, and a MET electrode configuration as the sensing read-out mechanism. The promising and unique performance of the MET design allows the fabricated device to achieve 10.8 V/G(G=9.81 m/s2) sensitivity at 20 Hz with nearly flat response over the frequency range from 1 to 50 Hz, and a low noise floor of 75 μ G/v Hz at 20 Hz.",

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year = "2013",

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AU - Huang, Hai

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AU - Tang, Rui

AU - Oiler, Jonathon

AU - Yu, Hongyu

PY - 2013

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AB - This letter reports a low-frequency micro-accelerometer implementing a liquid-state sensing body, based on molecular electronic transducer (MET) in post-CMOS compatible microfabrication technology. The device employs a sub-microliter electrolyte droplet encapsulated in oil as the sensing body, and a MET electrode configuration as the sensing read-out mechanism. The promising and unique performance of the MET design allows the fabricated device to achieve 10.8 V/G(G=9.81 m/s2) sensitivity at 20 Hz with nearly flat response over the frequency range from 1 to 50 Hz, and a low noise floor of 75 μ G/v Hz at 20 Hz.

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KW - electrolyte droplet

KW - microelectromechanical systems (MEMS)

KW - molecular electronic transducer

KW - post-CMOS compatible

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Molecular electronic transducer-based low-frequency accelerometer fabricated with post-cmos compatible process using droplet as sensing body

Abstract

Keywords

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