Abstract
We develop a modified pulsed MOS technique for measuring generation lifetime in ultraclean and thin p/p+ epitaxial layers, which can be used to detect metallic impurities with densities as low as 1010 cm-3. The widely used classic version is shown to be unable to effectively detect such low impurity densities because of the domination of surface generation; whereas, recombination lifetime measurement techniques have serious limitations for layers that have smaller thicknesses than the minority carrier diffusion length.
Original language | English (US) |
---|---|
Article number | 6547165 |
Pages (from-to) | 2592-2597 |
Number of pages | 6 |
Journal | IEEE Transactions on Electron Devices |
Volume | 60 |
Issue number | 8 |
DOIs | |
State | Published - 2013 |
Keywords
- Carrier lifetimes
- Epitaxial layers
- MOS capacitors
- Semiconductor defects
- Semiconductor device measurements
- Semiconductor materials
- Silicon
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering