Modelling and analysis of CVD processes in porous media for ceramic composite preparation

Y. S. Lin, A. J. Burggraaf

Research output: Contribution to journalArticle

47 Citations (Scopus)

Abstract

A continuum phenomenological model is presented to describe chemical vapour deposition (CVD) of solid product inside porous substrate media for the preparation of reinforced ceramic-matrix composites [by the chemical vapour infiltration (CVI) process] and ceramic membrane composites (by a modified CVD process). The chemical reaction, intrapore diffusion, non-isobaric viscous flow and variation of substrate pore geometry during deposition are considered in the model which is readily solved by the orthogonal collocation numerical technique. Simulated deposition profiles across substrate are given to examine the effects of the reaction mechanism, reaction and diffusion rate, substrate pore dimension, deposition temperature, bulk phase reactant concentration, intrapore diffusivity of reactants and pressure drop on the deposition results of a one-dimensional isothermal forced-flow CVI process and a modified non-isobaric CVD process for ceramic composite preparation. The theoretical analysis provides a better insight of the CVD processes in porous media and is useful in explaining experimental findings and guiding the selection of optimum process conditions for the CVD preparation of ceramic composites.

Original languageEnglish (US)
Pages (from-to)3067-3080
Number of pages14
JournalChemical Engineering Science
Volume46
Issue number12
DOIs
StatePublished - 1991
Externally publishedYes

Fingerprint

Porous materials
Chemical vapor deposition
Chemical vapor infiltration
Composite materials
Substrates
Ceramic membranes
Ceramic matrix composites
Viscous flow
Pressure drop
Chemical reactions
Geometry
Temperature

ASJC Scopus subject areas

  • Chemical Engineering(all)

Cite this

Modelling and analysis of CVD processes in porous media for ceramic composite preparation. / Lin, Y. S.; Burggraaf, A. J.

In: Chemical Engineering Science, Vol. 46, No. 12, 1991, p. 3067-3080.

Research output: Contribution to journalArticle

@article{6e95864665af44018831e18990394291,
title = "Modelling and analysis of CVD processes in porous media for ceramic composite preparation",
abstract = "A continuum phenomenological model is presented to describe chemical vapour deposition (CVD) of solid product inside porous substrate media for the preparation of reinforced ceramic-matrix composites [by the chemical vapour infiltration (CVI) process] and ceramic membrane composites (by a modified CVD process). The chemical reaction, intrapore diffusion, non-isobaric viscous flow and variation of substrate pore geometry during deposition are considered in the model which is readily solved by the orthogonal collocation numerical technique. Simulated deposition profiles across substrate are given to examine the effects of the reaction mechanism, reaction and diffusion rate, substrate pore dimension, deposition temperature, bulk phase reactant concentration, intrapore diffusivity of reactants and pressure drop on the deposition results of a one-dimensional isothermal forced-flow CVI process and a modified non-isobaric CVD process for ceramic composite preparation. The theoretical analysis provides a better insight of the CVD processes in porous media and is useful in explaining experimental findings and guiding the selection of optimum process conditions for the CVD preparation of ceramic composites.",
author = "Lin, {Y. S.} and Burggraaf, {A. J.}",
year = "1991",
doi = "10.1016/0009-2509(91)85010-U",
language = "English (US)",
volume = "46",
pages = "3067--3080",
journal = "Chemical Engineering Science",
issn = "0009-2509",
publisher = "Elsevier BV",
number = "12",

}

TY - JOUR

T1 - Modelling and analysis of CVD processes in porous media for ceramic composite preparation

AU - Lin, Y. S.

AU - Burggraaf, A. J.

PY - 1991

Y1 - 1991

N2 - A continuum phenomenological model is presented to describe chemical vapour deposition (CVD) of solid product inside porous substrate media for the preparation of reinforced ceramic-matrix composites [by the chemical vapour infiltration (CVI) process] and ceramic membrane composites (by a modified CVD process). The chemical reaction, intrapore diffusion, non-isobaric viscous flow and variation of substrate pore geometry during deposition are considered in the model which is readily solved by the orthogonal collocation numerical technique. Simulated deposition profiles across substrate are given to examine the effects of the reaction mechanism, reaction and diffusion rate, substrate pore dimension, deposition temperature, bulk phase reactant concentration, intrapore diffusivity of reactants and pressure drop on the deposition results of a one-dimensional isothermal forced-flow CVI process and a modified non-isobaric CVD process for ceramic composite preparation. The theoretical analysis provides a better insight of the CVD processes in porous media and is useful in explaining experimental findings and guiding the selection of optimum process conditions for the CVD preparation of ceramic composites.

AB - A continuum phenomenological model is presented to describe chemical vapour deposition (CVD) of solid product inside porous substrate media for the preparation of reinforced ceramic-matrix composites [by the chemical vapour infiltration (CVI) process] and ceramic membrane composites (by a modified CVD process). The chemical reaction, intrapore diffusion, non-isobaric viscous flow and variation of substrate pore geometry during deposition are considered in the model which is readily solved by the orthogonal collocation numerical technique. Simulated deposition profiles across substrate are given to examine the effects of the reaction mechanism, reaction and diffusion rate, substrate pore dimension, deposition temperature, bulk phase reactant concentration, intrapore diffusivity of reactants and pressure drop on the deposition results of a one-dimensional isothermal forced-flow CVI process and a modified non-isobaric CVD process for ceramic composite preparation. The theoretical analysis provides a better insight of the CVD processes in porous media and is useful in explaining experimental findings and guiding the selection of optimum process conditions for the CVD preparation of ceramic composites.

UR - http://www.scopus.com/inward/record.url?scp=0026403885&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0026403885&partnerID=8YFLogxK

U2 - 10.1016/0009-2509(91)85010-U

DO - 10.1016/0009-2509(91)85010-U

M3 - Article

VL - 46

SP - 3067

EP - 3080

JO - Chemical Engineering Science

JF - Chemical Engineering Science

SN - 0009-2509

IS - 12

ER -