Abstract
The ensemble Monte Carlo method, self-consistently coupled with the Poisson Solver, is used to study the high-field electron transport properties in Si and strained Si in short channel MOSFETs. A 0.1 μm gate-length Si and strained-Si n-MOSFET has been investigated and the results show a 50% current enhancement factor in the strained Si channel device.
Original language | English (US) |
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Pages (from-to) | 531-533 |
Number of pages | 3 |
Journal | Physica Status Solidi (B) Basic Research |
Volume | 204 |
Issue number | 1 |
DOIs | |
State | Published - Nov 1997 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics