Modeling of harmonic side-drive micromotor operation

V. R. Dhuler, M. Mehregany, S. M. Phillips, J. H. Lang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations


This paper develops a theoretical model to describe the operation of harmonic side-drive micromotors. The model is based on a detailed analysis of the electrostatic and friction forces acting on the bearing and bushing contacts. In particular, the model accounts for sliding and rolling of the rotor on the bearing, and sliding of the rotor on the bushing. Using the model, the rotor transient can be predicted for a step voltage excitation of a given stator pole. The shape of this step transient is affected by the excitation voltage magnitude, and the friction parameters for the bearing and the bushing. The model is used to fit data from experimental measurements of rotor motion to determine the bearing and bushing frictional parameters.

Original languageEnglish (US)
Title of host publicationMicromechanical Sensors, Actuators, and Systems
PublisherPubl by ASME
Number of pages14
ISBN (Print)0791808637
StatePublished - 1991
Externally publishedYes
EventWinter Annual Meeting of the American Society of Mechanical Engineers - Atlanta, GA, USA
Duration: Dec 1 1991Dec 6 1991

Publication series

NameAmerican Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC


OtherWinter Annual Meeting of the American Society of Mechanical Engineers
CityAtlanta, GA, USA

ASJC Scopus subject areas

  • Software
  • Mechanical Engineering


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