MOCVD synthesis of yttria doped perovskite type SrCeO3 thin films

M. Pan, G. Y. Meng, C. S. Chen, D. K. Peng, Jerry Lin

Research output: Contribution to journal › Article

9 Citations (Scopus)

Abstract

Yttria doped SrCeO3 films were deposited on YSZ substrates by MOCVD using a novel solid precursor containing a mixture of β-diketonate complexes of Sr, Ce and Y. The deposited films were polycrystalline consisting of nanoscale crystallizes. Single crystal YSZ substrate was found to be most suitable for preparing yttria doped SrCeO3 films. Using dry and well-mixed precursor was critical for obtaining a single phase yttria doped perovskite SrCeO3 films by the MOCVD method.

Original languageEnglish (US)
Pages (from-to)44-47
Number of pages4
JournalMaterials Letters
Volume36
Issue number1-4
StatePublished - Jul 1998
Externally publishedYes

Fingerprint

Yttrium oxide
Metallorganic chemical vapor deposition
Perovskite
metalorganic chemical vapor deposition
Thin films
synthesis
thin films
yttria-stabilized zirconia
Substrates
Complex Mixtures
Single crystals
yttria
perovskite
single crystals

Keywords

  • β-Diketonate precursor
  • Doped SrCeO
  • MOCVD
  • Perovskite
  • Thin film

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Pan, M., Meng, G. Y., Chen, C. S., Peng, D. K., & Lin, J. (1998). MOCVD synthesis of yttria doped perovskite type SrCeO3 thin films. Materials Letters, 36(1-4), 44-47.

MOCVD synthesis of yttria doped perovskite type SrCeO3 thin films. / Pan, M.; Meng, G. Y.; Chen, C. S.; Peng, D. K.; Lin, Jerry.

In: Materials Letters, Vol. 36, No. 1-4, 07.1998, p. 44-47.

Research output: Contribution to journal › Article

Pan, M, Meng, GY, Chen, CS, Peng, DK & Lin, J 1998, 'MOCVD synthesis of yttria doped perovskite type SrCeO3 thin films', Materials Letters, vol. 36, no. 1-4, pp. 44-47.
Pan M, Meng GY, Chen CS, Peng DK, Lin J. MOCVD synthesis of yttria doped perovskite type SrCeO3 thin films. Materials Letters. 1998 Jul;36(1-4):44-47.
Pan, M. ; Meng, G. Y. ; Chen, C. S. ; Peng, D. K. ; Lin, Jerry. / MOCVD synthesis of yttria doped perovskite type SrCeO3 thin films. In: Materials Letters. 1998 ; Vol. 36, No. 1-4. pp. 44-47.
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AB - Yttria doped SrCeO3 films were deposited on YSZ substrates by MOCVD using a novel solid precursor containing a mixture of β-diketonate complexes of Sr, Ce and Y. The deposited films were polycrystalline consisting of nanoscale crystallizes. Single crystal YSZ substrate was found to be most suitable for preparing yttria doped SrCeO3 films. Using dry and well-mixed precursor was critical for obtaining a single phase yttria doped perovskite SrCeO3 films by the MOCVD method.

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