MOCVD synthesis of yttria doped perovskite type SrCeO3 thin films

M. Pan; G. Y. Meng; C. S. Chen; D. K. Peng; Y. S. Lin

doi:10.1016/S0167-577X(97)00284-X

MOCVD synthesis of yttria doped perovskite type SrCeO₃ thin films

M. Pan, G. Y. Meng, C. S. Chen, D. K. Peng, Y. S. Lin

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

Yttria doped SrCeO₃ films were deposited on YSZ substrates by MOCVD using a novel solid precursor containing a mixture of β-diketonate complexes of Sr, Ce and Y. The deposited films were polycrystalline consisting of nanoscale crystallizes. Single crystal YSZ substrate was found to be most suitable for preparing yttria doped SrCeO₃ films. Using dry and well-mixed precursor was critical for obtaining a single phase yttria doped perovskite SrCeO₃ films by the MOCVD method.

Original language	English (US)
Pages (from-to)	44-47
Number of pages	4
Journal	Materials Letters
Volume	36
Issue number	1-4
DOIs	https://doi.org/10.1016/S0167-577X(97)00284-X
State	Published - Jul 1998
Externally published	Yes

Keywords

Doped SrCeO
MOCVD
Perovskite
Thin film
β-Diketonate precursor

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Access to Document

10.1016/S0167-577X(97)00284-X

Cite this

@article{51b92133ac6944a4ae40ee53705f8ccd,

title = "MOCVD synthesis of yttria doped perovskite type SrCeO3 thin films",

abstract = "Yttria doped SrCeO3 films were deposited on YSZ substrates by MOCVD using a novel solid precursor containing a mixture of β-diketonate complexes of Sr, Ce and Y. The deposited films were polycrystalline consisting of nanoscale crystallizes. Single crystal YSZ substrate was found to be most suitable for preparing yttria doped SrCeO3 films. Using dry and well-mixed precursor was critical for obtaining a single phase yttria doped perovskite SrCeO3 films by the MOCVD method.",

keywords = "Doped SrCeO, MOCVD, Perovskite, Thin film, β-Diketonate precursor",

author = "M. Pan and Meng, {G. Y.} and Chen, {C. S.} and Peng, {D. K.} and Lin, {Y. S.}",

note = "Funding Information: The financial support from National Natural Science Foundation of China and National Science Foundation of US (INS-9514846) for this work is greatly appreciated. ",

year = "1998",

month = jul,

doi = "10.1016/S0167-577X(97)00284-X",

language = "English (US)",

volume = "36",

pages = "44--47",

journal = "Materials Letters",

issn = "0167-577X",

publisher = "Elsevier",

number = "1-4",

}

TY - JOUR

T1 - MOCVD synthesis of yttria doped perovskite type SrCeO3 thin films

AU - Pan, M.

AU - Meng, G. Y.

AU - Chen, C. S.

AU - Peng, D. K.

AU - Lin, Y. S.

N1 - Funding Information: The financial support from National Natural Science Foundation of China and National Science Foundation of US (INS-9514846) for this work is greatly appreciated.

PY - 1998/7

Y1 - 1998/7

N2 - Yttria doped SrCeO3 films were deposited on YSZ substrates by MOCVD using a novel solid precursor containing a mixture of β-diketonate complexes of Sr, Ce and Y. The deposited films were polycrystalline consisting of nanoscale crystallizes. Single crystal YSZ substrate was found to be most suitable for preparing yttria doped SrCeO3 films. Using dry and well-mixed precursor was critical for obtaining a single phase yttria doped perovskite SrCeO3 films by the MOCVD method.

AB - Yttria doped SrCeO3 films were deposited on YSZ substrates by MOCVD using a novel solid precursor containing a mixture of β-diketonate complexes of Sr, Ce and Y. The deposited films were polycrystalline consisting of nanoscale crystallizes. Single crystal YSZ substrate was found to be most suitable for preparing yttria doped SrCeO3 films. Using dry and well-mixed precursor was critical for obtaining a single phase yttria doped perovskite SrCeO3 films by the MOCVD method.

KW - Doped SrCeO

KW - MOCVD

KW - Perovskite

KW - Thin film

KW - β-Diketonate precursor

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U2 - 10.1016/S0167-577X(97)00284-X

DO - 10.1016/S0167-577X(97)00284-X

M3 - Article

AN - SCOPUS:0032122823

VL - 36

SP - 44

EP - 47

JO - Materials Letters

JF - Materials Letters

SN - 0167-577X

IS - 1-4

ER -