Quantitative analysis of small unpolished particles is important for many applications, yet few computer programs are available to perform the necessary data reduction. A new procedure is presented for performing rapid quantitative analyses of unpolished particles in an electron-beam instrument equipped with an energy-dispersive spectrometer (EDS). Data are presented that demonstrate unpolished particles, ranging in diameter from 0. 1 up to 20 mu m, can be quantitatively analyzed with an accuracy of 5-10% relative, based on thick polished simple oxide standards. This correction has been incorporated in a minicomputer program FRMRUN.
|Original language||English (US)|
|Title of host publication||Proceedings, Annual Conference - Microbeam Analysis Society|
|Number of pages||7|
|State||Published - 1983|
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