Abstract
Quantitative analysis of small unpolished particles is important for many applications, yet few computer programs are available to perform the necessary data reduction. A new procedure is presented for performing rapid quantitative analyses of unpolished particles in an electron-beam instrument equipped with an energy-dispersive spectrometer (EDS). Data are presented that demonstrate unpolished particles, ranging in diameter from 0. 1 up to 20 mu m, can be quantitatively analyzed with an accuracy of 5-10% relative, based on thick polished simple oxide standards. This correction has been incorporated in a minicomputer program FRMRUN.
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings, Annual Conference - Microbeam Analysis Society |
| Editors | Ron Gooley |
| Pages | 195-201 |
| Number of pages | 7 |
| State | Published - 1983 |
| Externally published | Yes |
ASJC Scopus subject areas
- Engineering(all)