Mini-FAB simulation model comparing FIFO and MIVP schedule policies (outer loop), and PID and H∞ machine controllers (inner loop) for semiconductor diffusion by maintenance

Jose Job Flores-Godoy, Yah Wang, Donald W. Collins, Frank Hoppensteadt, Konstantinos Tsakalis

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Scopus citations

Fingerprint

Dive into the research topics of 'Mini-FAB simulation model comparing FIFO and MIVP schedule policies (outer loop), and PID and H∞ machine controllers (inner loop) for semiconductor diffusion by maintenance'. Together they form a unique fingerprint.

Engineering & Materials Science