Mini-FAB simulation model comparing FIFO and MIVP schedule policies (outer loop), and PID and H machine controllers (inner loop) for semiconductor diffusion by maintenance

Jose Job Flores-Godoy, Yah Wang, Donald W. Collins, Frank Hoppensteadt, Konstantinos Tsakalis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

This Multiscale Integration of Manufacturing and Assembly Processes (MIMAP) demonstration project investigates the integration of two or more Thrust Area Groups (TAGs) by creating a flow of information and processes from two areas of research. The control theory research of two different controllers for diffusion furnaces used in semiconductor manufacturing which predict a specific window of machine failure, the mean-time-before-failure (MTBF). The objective is to increase yield, decrease cycle time, work-in-progress (WIP) and production costs. A global factory Minimum Inventory Variability Scheduling policy (MIVP), used to decrease cycle time and cycle time variance when compared to a first-in-first-out (FIFO) scheduling policy, was used to make the comparisons between the two inner and outer loop controllers. The project's Cross Cutting Methodologies (CCMs) is ensured by the participation of faculty from three different colleges (LAS, CEAS, and CTAS) and two electrical engineering doctoral students.

Original languageEnglish (US)
Title of host publicationIECON Proceedings (Industrial Electronics Conference)
Editors Anon
Place of PublicationLos Alamitos, CA, United States
PublisherIEEE Comp Soc
Pages253-258
Number of pages6
Volume1
StatePublished - 1998
EventProceedings of the 1998 24th Annual Conference of the IEEE Industrial Electronics Society, IECON. Part 4 (of 4) - Aachen, Ger
Duration: Aug 31 1998Sep 4 1998

Other

OtherProceedings of the 1998 24th Annual Conference of the IEEE Industrial Electronics Society, IECON. Part 4 (of 4)
CityAachen, Ger
Period8/31/989/4/98

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Flores-Godoy, J. J., Wang, Y., Collins, D. W., Hoppensteadt, F., & Tsakalis, K. (1998). Mini-FAB simulation model comparing FIFO and MIVP schedule policies (outer loop), and PID and H machine controllers (inner loop) for semiconductor diffusion by maintenance. In Anon (Ed.), IECON Proceedings (Industrial Electronics Conference) (Vol. 1, pp. 253-258). IEEE Comp Soc.