Abstract

A sol was spun on single crystal silicon substrates at a spin-rate of 3000-5000 rpm followed by a low temperature cure to form a stable sol-gel/silicon structure. Good quality crystalline HA films of thickness ̃300-400 nm were obtained by annealing the sol-gel/Si structure in a conventional cavity applicator microwave system with a magnetron power of 1300 W, frequency of 2.45 GHz, and at a low processing temperature of 425 °C for annealing times ranging from 2-60 min. X-ray Diffraction and FTIR analysis confirmed that the crystalline quality of the thin films were comparable or better than those heat-treated under the same processing conditions (temperature and time) in a Rapid Thermal Annealing (RTA) system. The RBS data suggests a composition corresponding to stoichiometric hydroxyapatite Ca 10(PO4)6(OH)2, the major inorganic component of bone. The results showed that the HA film thickness decreases with increasing sol spin-rate. The HA films showed good biocompatibility because little monocyte adhesion occurred and hence no inflammatory response was activated in vitro. The potential of microwave annealing for rapid and low temperature processing of good crystalline quality HA thin films derived from sol-gel is demonstrated.

Original languageEnglish (US)
Pages (from-to)7150-7158
Number of pages9
JournalJournal of Materials Science
Volume41
Issue number21
DOIs
StatePublished - Nov 2006

Fingerprint

Durapatite
Hydroxyapatite
Microwaves
Annealing
Crystalline materials
Sol-gels
microwaves
Thin films
preparation
annealing
gels
Polymethyl Methacrylate
Silicon
thin films
Sols
Processing
monocytes
Temperature
Applicators
Rapid thermal annealing

ASJC Scopus subject areas

  • Materials Science(all)
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Microwave annealing for preparation of crystalline hydroxyapatite thin films. / Adams, Daniel; Malgas, Gerald F.; Smith, R. D.; Massia, Stephen; Alford, Terry; Mayer, J. W.

In: Journal of Materials Science, Vol. 41, No. 21, 11.2006, p. 7150-7158.

Research output: Contribution to journalArticle

Adams, Daniel ; Malgas, Gerald F. ; Smith, R. D. ; Massia, Stephen ; Alford, Terry ; Mayer, J. W. / Microwave annealing for preparation of crystalline hydroxyapatite thin films. In: Journal of Materials Science. 2006 ; Vol. 41, No. 21. pp. 7150-7158.
@article{d8636a6235b144088f225399845f7c0a,
title = "Microwave annealing for preparation of crystalline hydroxyapatite thin films",
abstract = "A sol was spun on single crystal silicon substrates at a spin-rate of 3000-5000 rpm followed by a low temperature cure to form a stable sol-gel/silicon structure. Good quality crystalline HA films of thickness ̃300-400 nm were obtained by annealing the sol-gel/Si structure in a conventional cavity applicator microwave system with a magnetron power of 1300 W, frequency of 2.45 GHz, and at a low processing temperature of 425 °C for annealing times ranging from 2-60 min. X-ray Diffraction and FTIR analysis confirmed that the crystalline quality of the thin films were comparable or better than those heat-treated under the same processing conditions (temperature and time) in a Rapid Thermal Annealing (RTA) system. The RBS data suggests a composition corresponding to stoichiometric hydroxyapatite Ca 10(PO4)6(OH)2, the major inorganic component of bone. The results showed that the HA film thickness decreases with increasing sol spin-rate. The HA films showed good biocompatibility because little monocyte adhesion occurred and hence no inflammatory response was activated in vitro. The potential of microwave annealing for rapid and low temperature processing of good crystalline quality HA thin films derived from sol-gel is demonstrated.",
author = "Daniel Adams and Malgas, {Gerald F.} and Smith, {R. D.} and Stephen Massia and Terry Alford and Mayer, {J. W.}",
year = "2006",
month = "11",
doi = "10.1007/s10853-006-0925-7",
language = "English (US)",
volume = "41",
pages = "7150--7158",
journal = "Journal of Materials Science",
issn = "0022-2461",
publisher = "Springer Netherlands",
number = "21",

}

TY - JOUR

T1 - Microwave annealing for preparation of crystalline hydroxyapatite thin films

AU - Adams, Daniel

AU - Malgas, Gerald F.

AU - Smith, R. D.

AU - Massia, Stephen

AU - Alford, Terry

AU - Mayer, J. W.

PY - 2006/11

Y1 - 2006/11

N2 - A sol was spun on single crystal silicon substrates at a spin-rate of 3000-5000 rpm followed by a low temperature cure to form a stable sol-gel/silicon structure. Good quality crystalline HA films of thickness ̃300-400 nm were obtained by annealing the sol-gel/Si structure in a conventional cavity applicator microwave system with a magnetron power of 1300 W, frequency of 2.45 GHz, and at a low processing temperature of 425 °C for annealing times ranging from 2-60 min. X-ray Diffraction and FTIR analysis confirmed that the crystalline quality of the thin films were comparable or better than those heat-treated under the same processing conditions (temperature and time) in a Rapid Thermal Annealing (RTA) system. The RBS data suggests a composition corresponding to stoichiometric hydroxyapatite Ca 10(PO4)6(OH)2, the major inorganic component of bone. The results showed that the HA film thickness decreases with increasing sol spin-rate. The HA films showed good biocompatibility because little monocyte adhesion occurred and hence no inflammatory response was activated in vitro. The potential of microwave annealing for rapid and low temperature processing of good crystalline quality HA thin films derived from sol-gel is demonstrated.

AB - A sol was spun on single crystal silicon substrates at a spin-rate of 3000-5000 rpm followed by a low temperature cure to form a stable sol-gel/silicon structure. Good quality crystalline HA films of thickness ̃300-400 nm were obtained by annealing the sol-gel/Si structure in a conventional cavity applicator microwave system with a magnetron power of 1300 W, frequency of 2.45 GHz, and at a low processing temperature of 425 °C for annealing times ranging from 2-60 min. X-ray Diffraction and FTIR analysis confirmed that the crystalline quality of the thin films were comparable or better than those heat-treated under the same processing conditions (temperature and time) in a Rapid Thermal Annealing (RTA) system. The RBS data suggests a composition corresponding to stoichiometric hydroxyapatite Ca 10(PO4)6(OH)2, the major inorganic component of bone. The results showed that the HA film thickness decreases with increasing sol spin-rate. The HA films showed good biocompatibility because little monocyte adhesion occurred and hence no inflammatory response was activated in vitro. The potential of microwave annealing for rapid and low temperature processing of good crystalline quality HA thin films derived from sol-gel is demonstrated.

UR - http://www.scopus.com/inward/record.url?scp=33751547181&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33751547181&partnerID=8YFLogxK

U2 - 10.1007/s10853-006-0925-7

DO - 10.1007/s10853-006-0925-7

M3 - Article

AN - SCOPUS:33751547181

VL - 41

SP - 7150

EP - 7158

JO - Journal of Materials Science

JF - Journal of Materials Science

SN - 0022-2461

IS - 21

ER -