Microstructure of TiAlNiAu Ohmic Contacts for N-Polar GaN/AlGaN HEMTs

Lin Zhou, M. R. Johnson, D. F. Storm, D. J. Meyer, D. S. Katzer, David Smith

Research output: Contribution to journalArticlepeer-review

1 Scopus citations
Original languageEnglish (US)
Pages (from-to)1802-1803
Number of pages2
JournalMicroscopy and Microanalysis
Issue numberS2
StatePublished - Jul 2012

ASJC Scopus subject areas

  • Instrumentation

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