Microstructure of TiAlNiAu Ohmic Contacts for N-Polar GaN/AlGaN HEMTs

Lin Zhou; M. R. Johnson; D. F. Storm; D. J. Meyer; D. S. Katzer; David Smith

doi:10.1017/S1431927612010860

Microstructure of TiAlNiAu Ohmic Contacts for N-Polar GaN/AlGaN HEMTs

Lin Zhou, M. R. Johnson, D. F. Storm, D. J. Meyer, D. S. Katzer, David Smith

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	1802-1803
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	18
Issue number	S2
DOIs	https://doi.org/10.1017/S1431927612010860
State	Published - Jul 2012

ASJC Scopus subject areas

Instrumentation

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10.1017/S1431927612010860

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title = "Microstructure of TiAlNiAu Ohmic Contacts for N-Polar GaN/AlGaN HEMTs",

author = "Lin Zhou and Johnson, {M. R.} and Storm, {D. F.} and Meyer, {D. J.} and Katzer, {D. S.} and David Smith",

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language = "English (US)",

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journal = "Microscopy and Microanalysis",

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TY - JOUR

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AU - Zhou, Lin

AU - Johnson, M. R.

AU - Storm, D. F.

AU - Meyer, D. J.

AU - Katzer, D. S.

AU - Smith, David

PY - 2012/7

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AN - SCOPUS:85008522440

SN - 1431-9276

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JO - Microscopy and Microanalysis

JF - Microscopy and Microanalysis

IS - S2

ER -

Microstructure of TiAlNiAu Ohmic Contacts for N-Polar GaN/AlGaN HEMTs

ASJC Scopus subject areas

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