@inproceedings{de79ed3b4b1547fba1f08f8b13046a56,
title = "Microstructure of InxGa1-xN thick epitaxial layers",
abstract = "0.μm thick InxGa1-xN epitaxial layers were grown by metal organic chemical vapor deposition on undoped GaN. GaN layers were ∼2.7μm thick and were grown on c-plane sapphire using low-temperature GaN buffer layers. Convergent-beam electron diffraction (CBED) was used to observe the local strain and dislocation density. The indium concentration of the InxGa1-xN was measured by Rutherford backscattering spectrometry (RBS). Using scanning electron microscopy and transmission electron microscopy InxGa1-xN layers cathodoluminescence spectra were studied.",
keywords = "Buffer layers, Capacitive sensors, Chemical vapor deposition, Diffraction, Epitaxial layers, Gallium nitride, Microstructure, Organic chemicals, Scanning electron microscopy, Transmission electron microscopy",
author = "L. Geng and S. Srinivasan and R. Liu and B. Jiang and H. Omiya and Fernando Ponce and S. Tanaka and Y. Nakagawa",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 2003 International Symposium on Compound Semiconductors, ISCS 2003 ; Conference date: 25-08-2003 Through 27-08-2003",
year = "2003",
doi = "10.1109/ISCS.2003.1239879",
language = "English (US)",
series = "IEEE International Symposium on Compound Semiconductors, Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "8--9",
booktitle = "2003 International Symposium on Compound Semiconductors, ISCS 2003",
}