Microstructure and properties of sol-gel derived Pb(Zr_0.3Ti _0.7)O₃ thin films on GaN/sapphire for nanoelectromechanical systems

Physics & Astronomy

• sapphire 58%
• gels 53%
• microstructure 40%
• configurations 36%
• capacitance 36%
• thin films 35%
• striation 28%
• capacitance-voltage characteristics 28%
• magnetic force microscopy 27%
• annealing 27%
• sol-gel processes 27%
• electric potential 24%
• depolarization 22%
• wurtzite 22%
• stoichiometry 21%
• field emission 20%
• backscattering 20%
• crystallinity 20%
• surface roughness 19%
• perovskites 18%
• hysteresis 17%
• atomic force microscopy 17%
• scanning 14%
• single crystals 14%
• electrodes 14%
• defects 12%
• polarization 12%
• diffraction 12%
• spectroscopy 11%
• metals 11%
• x rays 10%
• electrons 9%
• temperature 6%

Engineering & Materials Science

• NEMS 100%
• Sapphire 91%
• Sol-gels 89%
• Lead zirconate titanate 82%
• Thin films 64%
• Microstructure 45%
• Capacitance 14%
• Rutherford backscattering spectroscopy 10%
• Electric potential 8%
• Rapid thermal annealing 8%
• Substrates 8%
• Depolarization 8%
• Perovskite 7%
• Sol-gel process 7%
• Stoichiometry 7%
• Ferroelectric materials 7%
• Field emission 7%
• Atomic force microscopy 7%
• Crystallinity 6%
• Single crystals 6%
• Electrons 5%
• Annealing 5%
• X ray diffraction 5%
• Hysteresis 5%
• Polarization 5%
• Semiconductor materials 5%
• Surface roughness 4%
• Scanning 4%
• Electrodes 4%
• Defects 3%
• Metals 3%
• Temperature 2%

Chemical Compounds

• Rapid Thermal Annealing 51%
• Microstructure 46%
• Rutherford Backscattering Spectroscopy 43%
• Depolarization 38%
• Field Emission 34%
• Hysteresis 33%
• Reaction Stoichiometry 27%
• Sol Gel Process 27%
• Atomic Force Microscopy 27%
• Annealing 26%
• Crystallinity 26%
• Polarization 25%
• Voltage 24%
• Single Crystalline Solid 24%
• Surface 21%
• Electron Particle 18%
• Behavior as Electrode 17%
• X-Ray Diffraction 16%
• Liquid Film 16%