Microstructural and chemical characterization of the Inconel/Ti(n) thin film and multilayer system

Engineering & Materials Science

• Multilayers 76%
• Thin films 74%
• Nitrogen 72%
• Sputtering 67%
• Titanium 50%
• X rays 47%
• Photoelectron spectroscopy 44%
• High resolution transmission electron microscopy 42%
• Multilayer films 39%
• Ion beams 37%
• Microstructure 35%
• Electron probe microanalysis 35%
• Nitrides 31%
• Partial pressure 31%
• Argon 29%
• Helium 29%
• Spectroscopy 29%
• Diffraction 28%
• Ions 24%
• Chemical analysis 17%
• Metals 16%

Physics & Astronomy

• Inconel (trademark) 100%
• characterization 43%
• nitrogen 43%
• thin films 40%
• titanium 32%
• sputtering 30%
• atmospheres 27%
• metal nitrides 27%
• microstructure 23%
• electron probes 21%
• microanalysis 21%
• x ray spectroscopy 20%
• mass spectroscopy 19%
• partial pressure 18%
• x ray diffraction 17%
• electron microscopy 16%
• chemistry 16%
• photoelectron spectroscopy 16%
• helium 15%
• argon 15%
• ion beams 15%
• high resolution 11%
• ions 9%

Medicine & Life Sciences

• Nitrogen 77%
• Atmosphere 61%
• Titanium 54%
• Secondary Ion Mass Spectrometry 44%
• X-Rays 40%
• Photoelectron Spectroscopy 39%
• Electron Probe Microanalysis 38%
• Helium 36%
• Argon 32%
• Partial Pressure 31%
• Metals 22%
• Electron Microscopy 22%
• Ions 21%