Microscopic aspects of oxygen precipitation in silicon

Engineering & Materials Science

• Oxygen 62%
• Silicon 61%
• Defects 53%
• Precipitates 40%
• Silica 39%
• Impurities 37%
• Thermodynamics 33%
• Oxides 33%

Physics & Astronomy

• Frenkel defects 56%
• oxygen 46%
• silicon 41%
• precipitates 33%
• silicon dioxide 29%
• thermodynamics 26%
• impurities 25%
• oxides 24%
• kinetics 23%
• defects 21%

Chemical Compounds

• Crystal Point Defect 100%
• Crystal Defect 90%
• Thermodynamics 48%
• Oxide 41%
• Dioxygen 37%