A new methodology to create 3D origami patterns out of Si NMs using pre-stretched and pre-patterned PDMS substrates was studied. Silicon mold was made by a single side bare silicon wafer which was patterned with origami patterns by deep silicon etching. The photoresist was then removed with acetone and a thin layer of release agent 1H,1H,2H,2H-perfluorooctyltrichlorosilane was vapor-coated on top of the silicon. PDMS solution was then poured into the mold and cure at 80°C for 3 h. PDMS was peeled and cut into desire shape. The FEA was conducted using commercial finite element software package ABAQUS, and consists of two steps. To harness the tunability of the origami-based 3D architectures, one application on physically reconfigurable antenna has been demonstrated. It is observed that the generated Si NM origami agrees reasonably well with both the analytical and FEA results. The major discrepancies occur at the mountain vertices since the analytical solution and FEA results are based on zero size of creases while the experiments have finite size of the elevated PDMS walls.

Original languageEnglish (US)
Pages (from-to)5401-5406
Number of pages6
Issue number39
StatePublished - 2016


  • PDMS
  • origami
  • reconfigurable antenna
  • silicon nanomambranes

ASJC Scopus subject areas

  • Biotechnology
  • Biomaterials
  • Chemistry(all)
  • Materials Science(all)

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  • Cite this

    Song, Z., Lv, C., Liang, M., Sanphuang, V., Wu, K., Chen, B., Zhao, Z., Bai, J., Wang, X., Volakis, J. L., Wang, L., He, X., Yao, Y., Tongay, S., & Jiang, H. (2016). Microscale Silicon Origami. Small, 12(39), 5401-5406. https://doi.org/10.1002/smll.201601947