Abstract
A modified chemical vapour deposition (CVD) and electrochemical vapour deposition (EVD) technique is developed to prepared microporous or dense ceramic membranes by modifying ultrafiltration alumina membranes. Using this CVD/EVD technique, thin (2-5μm) or very thin (0.2-1μm) dense gastight yttria stabilized zirconia films which are oxygen semipermeable were grown on various types of porous substrates. The surface properties and pore size of the top layer of the alumina membranes were modified by depositing a zirconia/yttria solid solution on the internal pore surface of the membrane top layer in order to obtain gas separation properties of surface diffusion or microporous diffusion.
| Original language | English (US) |
|---|---|
| Title of host publication | Key Engineering Materials |
| Pages | 465-468 |
| Number of pages | 4 |
| Volume | 61-62 |
| State | Published - Dec 1 1991 |
| Externally published | Yes |
| Event | Proceedings of the 2nd International Conference on Inorganic Membranes - ICIM2-91 - Montpellier, Fr Duration: Jul 1 1991 → Jul 4 1991 |
Other
| Other | Proceedings of the 2nd International Conference on Inorganic Membranes - ICIM2-91 |
|---|---|
| City | Montpellier, Fr |
| Period | 7/1/91 → 7/4/91 |
ASJC Scopus subject areas
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering
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Cite this
Lin, Y. S., Meijerink, J., Brinkman, H. W., de Vries, K. J., & Burggraaf, A. J. (1991). Microporous and dense ceramic membranes prepared by CVD and EVD. In Key Engineering Materials (Vol. 61-62, pp. 465-468)