Microporous and dense ceramic membranes prepared by CVD and EVD

Y. S. Lin, J. Meijerink, H. W. Brinkman, K. J. de Vries, A. J. Burggraaf

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

A modified chemical vapour deposition (CVD) and electrochemical vapour deposition (EVD) technique is developed to prepared microporous or dense ceramic membranes by modifying ultrafiltration alumina membranes. Using this CVD/EVD technique, thin (2-5μm) or very thin (0.2-1μm) dense gastight yttria stabilized zirconia films which are oxygen semipermeable were grown on various types of porous substrates. The surface properties and pore size of the top layer of the alumina membranes were modified by depositing a zirconia/yttria solid solution on the internal pore surface of the membrane top layer in order to obtain gas separation properties of surface diffusion or microporous diffusion.

Original languageEnglish (US)
Title of host publicationKey Engineering Materials
Pages465-468
Number of pages4
Volume61-62
StatePublished - Dec 1 1991
Externally publishedYes
EventProceedings of the 2nd International Conference on Inorganic Membranes - ICIM2-91 - Montpellier, Fr
Duration: Jul 1 1991Jul 4 1991

Other

OtherProceedings of the 2nd International Conference on Inorganic Membranes - ICIM2-91
CityMontpellier, Fr
Period7/1/917/4/91

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Lin, Y. S., Meijerink, J., Brinkman, H. W., de Vries, K. J., & Burggraaf, A. J. (1991). Microporous and dense ceramic membranes prepared by CVD and EVD. In Key Engineering Materials (Vol. 61-62, pp. 465-468)