Microporous and dense ceramic membranes prepared by CVD and EVD

Y. S. Lin, J. Meijerink, H. W. Brinkman, K. J. de Vries, A. J. Burggraa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Modified chemical vapour deposition (CVD) and electrochemical vapour deposition (EVD) technique is developed to prepare microporous or dense ceramic membranes by modifying ultrafiltration alumina membranes. Using this CVD/EVD technique, thin (2-5μm) or very thin (0.8-1μm) dense gas-tight yttria stabilized zirconia (YSZ) films which are oxygen semipermeable were grown on various types of porous substrates. The surface properties and pore size of the top-layer of the alumina membranes were modified by depositing a zirconia/yttria (ZY) solid solution on the internal pore surface of the membrane top-layer in order to obtain gas separation properties of surface diffusion or microporous diffusion.

Original languageEnglish (US)
Title of host publicationInorganic Membranes ICIM2-91
PublisherPubl by Trans Tech Publ
Pages465-468
Number of pages4
ISBN (Print)0878496254
StatePublished - Dec 1 1991
Externally publishedYes
EventProceedings of the 2nd International Conference on Inorganic Membranes - ICIM2-91 - Montpellier, Fr
Duration: Jul 1 1991Jul 4 1991

Publication series

NameInorganic Membranes ICIM2-91

Other

OtherProceedings of the 2nd International Conference on Inorganic Membranes - ICIM2-91
CityMontpellier, Fr
Period7/1/917/4/91

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Lin, Y. S., Meijerink, J., Brinkman, H. W., de Vries, K. J., & Burggraa, A. J. (1991). Microporous and dense ceramic membranes prepared by CVD and EVD. In Inorganic Membranes ICIM2-91 (pp. 465-468). (Inorganic Membranes ICIM2-91). Publ by Trans Tech Publ.