Abstract
This paper presents the first account of successful electrical operation of electrostatic microactuators in a liquid environment. Successful operation of both the flange and center-pin harmonic (hereafter referred to as wobble) and salient-pole side-drive micromotors in deionized water and silicone lubricating oil is achieved. The performance characteristics of the micromotors in a liquid are different from those in a gas environment. The minimum operating voltages are typically higher for operation in the liquids studied, while the maximum motor speeds possible are significantly lower. The motive torque is increased by the relative dielectric constant of the liquid, while the viscous drag torque is increased due to the high viscosity of the liquid. In contrast to operation in a gas environment, in a liquid, the gear ratio of the wobble micromotors is dependent on the excitation speed.
| Original language | English (US) |
|---|---|
| Title of host publication | Technical Digest- IEEE Solid-State Sensor and Actuator Workshop |
| Editors | Anon |
| Place of Publication | Piscataway, NJ, United States |
| Publisher | Publ by IEEE |
| Pages | 10-13 |
| Number of pages | 4 |
| ISBN (Print) | 078030456X |
| State | Published - 1992 |
| Externally published | Yes |
| Event | Proceedings of the 5th IEEE Solid-State Sensor and Actuator Workshop - Hilton Head Island, SC, USA Duration: Jun 22 1992 → Jun 25 1992 |
Other
| Other | Proceedings of the 5th IEEE Solid-State Sensor and Actuator Workshop |
|---|---|
| City | Hilton Head Island, SC, USA |
| Period | 6/22/92 → 6/25/92 |
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ASJC Scopus subject areas
- Engineering(all)
Cite this
Micromotor operation in a liquid environment. / Dhuler, V. R.; Mehregany, M.; Phillips, Stephen.
Technical Digest- IEEE Solid-State Sensor and Actuator Workshop. ed. / Anon. Piscataway, NJ, United States : Publ by IEEE, 1992. p. 10-13.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Micromotor operation in a liquid environment
AU - Dhuler, V. R.
AU - Mehregany, M.
AU - Phillips, Stephen
PY - 1992
Y1 - 1992
N2 - This paper presents the first account of successful electrical operation of electrostatic microactuators in a liquid environment. Successful operation of both the flange and center-pin harmonic (hereafter referred to as wobble) and salient-pole side-drive micromotors in deionized water and silicone lubricating oil is achieved. The performance characteristics of the micromotors in a liquid are different from those in a gas environment. The minimum operating voltages are typically higher for operation in the liquids studied, while the maximum motor speeds possible are significantly lower. The motive torque is increased by the relative dielectric constant of the liquid, while the viscous drag torque is increased due to the high viscosity of the liquid. In contrast to operation in a gas environment, in a liquid, the gear ratio of the wobble micromotors is dependent on the excitation speed.
AB - This paper presents the first account of successful electrical operation of electrostatic microactuators in a liquid environment. Successful operation of both the flange and center-pin harmonic (hereafter referred to as wobble) and salient-pole side-drive micromotors in deionized water and silicone lubricating oil is achieved. The performance characteristics of the micromotors in a liquid are different from those in a gas environment. The minimum operating voltages are typically higher for operation in the liquids studied, while the maximum motor speeds possible are significantly lower. The motive torque is increased by the relative dielectric constant of the liquid, while the viscous drag torque is increased due to the high viscosity of the liquid. In contrast to operation in a gas environment, in a liquid, the gear ratio of the wobble micromotors is dependent on the excitation speed.
UR - http://www.scopus.com/inward/record.url?scp=0026963818&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0026963818&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:0026963818
SN - 078030456X
SP - 10
EP - 13
BT - Technical Digest- IEEE Solid-State Sensor and Actuator Workshop
A2 - Anon, null
PB - Publ by IEEE
CY - Piscataway, NJ, United States
ER -