@inproceedings{3cc4363ab56240c8be361a92b3ff07c5,
title = "Micromotor operation in a liquid environment",
abstract = "This paper presents the first account of successful electrical operation of electrostatic microactuators in a liquid environment. Successful operation of both the flange and center-pin harmonic (hereafter referred to as wobble) and salient-pole side-drive micromotors in deionized water and silicone lubricating oil is achieved. The performance characteristics of the micromotors in a liquid are different from those in a gas environment. The minimum operating voltages are typically higher for operation in the liquids studied, while the maximum motor speeds possible are significantly lower. The motive torque is increased by the relative dielectric constant of the liquid, while the viscous drag torque is increased due to the high viscosity of the liquid. In contrast to operation in a gas environment, in a liquid, the gear ratio of the wobble micromotors is dependent on the excitation speed.",
author = "Dhuler, {V. R.} and M. Mehregany and Phillips, {S. M.}",
year = "1992",
month = dec,
day = "1",
language = "English (US)",
isbn = "078030456X",
series = "Technical Digest- IEEE Solid-State Sensor and Actuator Workshop",
publisher = "Publ by IEEE",
pages = "10--13",
editor = "Anon",
booktitle = "Technical Digest- IEEE Solid-State Sensor and Actuator Workshop",
note = "Proceedings of the 5th IEEE Solid-State Sensor and Actuator Workshop ; Conference date: 22-06-1992 Through 25-06-1992",
}