Abstract
This paper presents results on fabrication and testing of micromachined fuel atomizers for gas turbine engines. Pressure-swirl (simplex) atomizers are batch fabricated by bulk micromachining of silicon using deep reactive-ion-etching (RIE). The atomizers are fabricated as an array, according to a designed experiment, and the influence of the geometric features on the performance of the atomizers is studied. The atomizer design is optimized by a response surface methodology. Finally, a comparative study is done, comparing and contrasting the performance of the silicon atomizers with conventional and metallic atomizers.
Original language | English (US) |
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Title of host publication | Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) |
Place of Publication | Piscataway, NJ, United States |
Publisher | IEEE |
Pages | 473-478 |
Number of pages | 6 |
State | Published - 1996 |
Externally published | Yes |
Event | Proceedings of the 1995 9th Annual International Workshop on Micro Electro Mechanical Systems - San Diego, CA, USA Duration: Feb 11 1996 → Feb 15 1996 |
Other
Other | Proceedings of the 1995 9th Annual International Workshop on Micro Electro Mechanical Systems |
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City | San Diego, CA, USA |
Period | 2/11/96 → 2/15/96 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Electrical and Electronic Engineering
- Mechanical Engineering