Micromachined silicon fuel atomizers for gas turbine engines

Angad Singh, Mehran Mehregany, Stephen Phillips, Rex J. Harvey, Michael Benjamin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Scopus citations

Abstract

This paper presents results on fabrication and testing of micromachined fuel atomizers for gas turbine engines. Pressure-swirl (simplex) atomizers are batch fabricated by bulk micromachining of silicon using deep reactive-ion-etching (RIE). The atomizers are fabricated as an array, according to a designed experiment, and the influence of the geometric features on the performance of the atomizers is studied. The atomizer design is optimized by a response surface methodology. Finally, a comparative study is done, comparing and contrasting the performance of the silicon atomizers with conventional and metallic atomizers.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Place of PublicationPiscataway, NJ, United States
PublisherIEEE
Pages473-478
Number of pages6
StatePublished - 1996
Externally publishedYes
EventProceedings of the 1995 9th Annual International Workshop on Micro Electro Mechanical Systems - San Diego, CA, USA
Duration: Feb 11 1996Feb 15 1996

Other

OtherProceedings of the 1995 9th Annual International Workshop on Micro Electro Mechanical Systems
CitySan Diego, CA, USA
Period2/11/962/15/96

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering

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  • Cite this

    Singh, A., Mehregany, M., Phillips, S., Harvey, R. J., & Benjamin, M. (1996). Micromachined silicon fuel atomizers for gas turbine engines. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 473-478). IEEE.