Micromachined silicon fuel atomizers for gas turbine engines

Angad Singh, Mehran Mehregany, Stephen Phillips, Rex J. Harvey, Michael Benjamin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Citations (Scopus)

Abstract

This paper presents results on fabrication and testing of micromachined fuel atomizers for gas turbine engines. Pressure-swirl (simplex) atomizers are batch fabricated by bulk micromachining of silicon using deep reactive-ion-etching (RIE). The atomizers are fabricated as an array, according to a designed experiment, and the influence of the geometric features on the performance of the atomizers is studied. The atomizer design is optimized by a response surface methodology. Finally, a comparative study is done, comparing and contrasting the performance of the silicon atomizers with conventional and metallic atomizers.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Place of PublicationPiscataway, NJ, United States
PublisherIEEE
Pages473-478
Number of pages6
StatePublished - 1996
Externally publishedYes
EventProceedings of the 1995 9th Annual International Workshop on Micro Electro Mechanical Systems - San Diego, CA, USA
Duration: Feb 11 1996Feb 15 1996

Other

OtherProceedings of the 1995 9th Annual International Workshop on Micro Electro Mechanical Systems
CitySan Diego, CA, USA
Period2/11/962/15/96

Fingerprint

Atomizers
Gas turbines
Turbines
Silicon
Reactive ion etching
Micromachining
Fabrication
Testing

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Singh, A., Mehregany, M., Phillips, S., Harvey, R. J., & Benjamin, M. (1996). Micromachined silicon fuel atomizers for gas turbine engines. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 473-478). Piscataway, NJ, United States: IEEE.

Micromachined silicon fuel atomizers for gas turbine engines. / Singh, Angad; Mehregany, Mehran; Phillips, Stephen; Harvey, Rex J.; Benjamin, Michael.

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway, NJ, United States : IEEE, 1996. p. 473-478.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Singh, A, Mehregany, M, Phillips, S, Harvey, RJ & Benjamin, M 1996, Micromachined silicon fuel atomizers for gas turbine engines. in Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). IEEE, Piscataway, NJ, United States, pp. 473-478, Proceedings of the 1995 9th Annual International Workshop on Micro Electro Mechanical Systems, San Diego, CA, USA, 2/11/96.
Singh A, Mehregany M, Phillips S, Harvey RJ, Benjamin M. Micromachined silicon fuel atomizers for gas turbine engines. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway, NJ, United States: IEEE. 1996. p. 473-478
Singh, Angad ; Mehregany, Mehran ; Phillips, Stephen ; Harvey, Rex J. ; Benjamin, Michael. / Micromachined silicon fuel atomizers for gas turbine engines. Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway, NJ, United States : IEEE, 1996. pp. 473-478
@inproceedings{5cfe03c0ebe347b29c3684ac892704f2,
title = "Micromachined silicon fuel atomizers for gas turbine engines",
abstract = "This paper presents results on fabrication and testing of micromachined fuel atomizers for gas turbine engines. Pressure-swirl (simplex) atomizers are batch fabricated by bulk micromachining of silicon using deep reactive-ion-etching (RIE). The atomizers are fabricated as an array, according to a designed experiment, and the influence of the geometric features on the performance of the atomizers is studied. The atomizer design is optimized by a response surface methodology. Finally, a comparative study is done, comparing and contrasting the performance of the silicon atomizers with conventional and metallic atomizers.",
author = "Angad Singh and Mehran Mehregany and Stephen Phillips and Harvey, {Rex J.} and Michael Benjamin",
year = "1996",
language = "English (US)",
pages = "473--478",
booktitle = "Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)",
publisher = "IEEE",

}

TY - GEN

T1 - Micromachined silicon fuel atomizers for gas turbine engines

AU - Singh, Angad

AU - Mehregany, Mehran

AU - Phillips, Stephen

AU - Harvey, Rex J.

AU - Benjamin, Michael

PY - 1996

Y1 - 1996

N2 - This paper presents results on fabrication and testing of micromachined fuel atomizers for gas turbine engines. Pressure-swirl (simplex) atomizers are batch fabricated by bulk micromachining of silicon using deep reactive-ion-etching (RIE). The atomizers are fabricated as an array, according to a designed experiment, and the influence of the geometric features on the performance of the atomizers is studied. The atomizer design is optimized by a response surface methodology. Finally, a comparative study is done, comparing and contrasting the performance of the silicon atomizers with conventional and metallic atomizers.

AB - This paper presents results on fabrication and testing of micromachined fuel atomizers for gas turbine engines. Pressure-swirl (simplex) atomizers are batch fabricated by bulk micromachining of silicon using deep reactive-ion-etching (RIE). The atomizers are fabricated as an array, according to a designed experiment, and the influence of the geometric features on the performance of the atomizers is studied. The atomizer design is optimized by a response surface methodology. Finally, a comparative study is done, comparing and contrasting the performance of the silicon atomizers with conventional and metallic atomizers.

UR - http://www.scopus.com/inward/record.url?scp=0029759779&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0029759779&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0029759779

SP - 473

EP - 478

BT - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

PB - IEEE

CY - Piscataway, NJ, United States

ER -