Micromachined silicon fuel atomizers for gas turbine engines

Angad Singh, Mehran Mehregany, Stephen Phillips, Rex J. Harvey, Michael Benjamin

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

This article presents results on fabrication and testing of micromachined fuel atomizers for gas turbine engines. Pressure-swirl (simplex) atomizers are batch fabricated by bulk micromachining of silicon using deep reactive ion etching. The atomizers are fabricated as an array, according to a designed experiment, and a study of the influence of the geometric features on the performance of the atomizers identifies the dominant geometric parameters The precision of the fabrication allows the atomizer design to be optimized by a response surface methodology. A comparative study reveals that microfabrication can improve the spray performance relative to conventional atomizers.

Original languageEnglish (US)
Pages (from-to)405-418
Number of pages14
JournalAtomization and Sprays
Volume8
Issue number4
StatePublished - 1998
Externally publishedYes

Fingerprint

gas turbine engines
atomizers
Atomizers
Silicon
Gas turbines
Turbines
silicon
Fabrication
fabrication
Microfabrication
Reactive ion etching
Micromachining
micromachining
sprayers
etching
methodology
Testing
ions

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)
  • Chemical Engineering(all)
  • Mechanical Engineering

Cite this

Singh, A., Mehregany, M., Phillips, S., Harvey, R. J., & Benjamin, M. (1998). Micromachined silicon fuel atomizers for gas turbine engines. Atomization and Sprays, 8(4), 405-418.

Micromachined silicon fuel atomizers for gas turbine engines. / Singh, Angad; Mehregany, Mehran; Phillips, Stephen; Harvey, Rex J.; Benjamin, Michael.

In: Atomization and Sprays, Vol. 8, No. 4, 1998, p. 405-418.

Research output: Contribution to journalArticle

Singh, A, Mehregany, M, Phillips, S, Harvey, RJ & Benjamin, M 1998, 'Micromachined silicon fuel atomizers for gas turbine engines', Atomization and Sprays, vol. 8, no. 4, pp. 405-418.
Singh A, Mehregany M, Phillips S, Harvey RJ, Benjamin M. Micromachined silicon fuel atomizers for gas turbine engines. Atomization and Sprays. 1998;8(4):405-418.
Singh, Angad ; Mehregany, Mehran ; Phillips, Stephen ; Harvey, Rex J. ; Benjamin, Michael. / Micromachined silicon fuel atomizers for gas turbine engines. In: Atomization and Sprays. 1998 ; Vol. 8, No. 4. pp. 405-418.
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