Abstract
This paper presents research at The University of Michigan on micromachined capacitive silicon accelerometers and gyroscopes with their interface electronics to satisfy the requirements for inertial navigation applications. The accelerometer systems developed employ in-plane (lateral), out-of-plane (z-axis), and single-chip 3-axis sensors with the interface electronics. The interface electronics forms a second-order electromechanical sigma-delta modulator together with the sensor and the system can be operated in both open and closed-loop. These devices can achieve better than 2μg/√Hz resolution with a range of ±1.35g. The single-crystal silicon ring gyroscope provides 132 mV/deg/sec sensitivity and 10 deg/hour resolution.
| Original language | English (US) |
|---|---|
| Title of host publication | IEEE International Conference on Intelligent Robots and Systems |
| Pages | 2353-2358 |
| Number of pages | 6 |
| Volume | 3 |
| State | Published - 2003 |
| Externally published | Yes |
| Event | 2003 IEEE/RSJ International Conference on Intelligent Robots and Systems - Las Vegas, NV, United States Duration: Oct 27 2003 → Oct 31 2003 |
Other
| Other | 2003 IEEE/RSJ International Conference on Intelligent Robots and Systems |
|---|---|
| Country/Territory | United States |
| City | Las Vegas, NV |
| Period | 10/27/03 → 10/31/03 |
ASJC Scopus subject areas
- Control and Systems Engineering