Micromachined silicon accelerometers and gyroscopes

Khalil Najafi, Junseok Chae, Haluk Kulah, Guohong He

Research output: Chapter in Book/Report/Conference proceedingConference contribution

16 Scopus citations


This paper presents research at The University of Michigan on micromachined capacitive silicon accelerometers and gyroscopes with their interface electronics to satisfy the requirements for inertial navigation applications. The accelerometer systems developed employ in-plane (lateral), out-of-plane (z-axis), and single-chip 3-axis sensors with the interface electronics. The interface electronics forms a second-order electromechanical sigma-delta modulator together with the sensor and the system can be operated in both open and closed-loop. These devices can achieve better than 2μg/√Hz resolution with a range of ±1.35g. The single-crystal silicon ring gyroscope provides 132 mV/deg/sec sensitivity and 10 deg/hour resolution.

Original languageEnglish (US)
Title of host publicationIEEE International Conference on Intelligent Robots and Systems
Number of pages6
StatePublished - 2003
Externally publishedYes
Event2003 IEEE/RSJ International Conference on Intelligent Robots and Systems - Las Vegas, NV, United States
Duration: Oct 27 2003Oct 31 2003


Other2003 IEEE/RSJ International Conference on Intelligent Robots and Systems
Country/TerritoryUnited States
CityLas Vegas, NV

ASJC Scopus subject areas

  • Control and Systems Engineering


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