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Micromachined probes for submillimeter-wave on-wafer measurements - Part I: Mechanical design and characterization
Theodore J. Reck, Lihan Chen, Chunhu Zhang, Alex Arsenovic, Christopher Groppi, Arthur W. Lichtenberger, Robert M. Weikle, N. Scott Barker
Research output: Contribution to journal › Article › peer-review
52
Scopus
citations