Micromachined piezoelectric acoustic device

Tian Ling Ren, Hao Chen, Yi Yang, Yi Ping Zhu, Di Fu, Chao Wang, Xiao Ming Wu, Jian Cai, Li Tian Liu, Zhi Jian Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Scopus citations

Abstract

Micromachined technology has been widely used to reduce device size and improve performance. In this paper, our research activities on micromachined piezoelectric acoustic devices at wide frequency range, from audio microphones to ultrasonic transducers, are reviewed. These devices are based on ferroelectric thin films, and exceed the conventional acoustic devices in excellent performance, miniaturized size, high reliability and compatibility with conventional integrated circuit fabrication. Resonance frequency can be determined by the thickness of each layer composing the thin film. Compact arrays of these devices are designed, fabricated and characterized to enhance sensitivity and pointing. Micromachined acoustic devices could find extensive applications in practical systems.

Original languageEnglish (US)
Title of host publication2009 2nd International Workshop on Electron Devices and Semiconductor Technology, IEDST '09
DOIs
StatePublished - Dec 1 2009
Externally publishedYes
Event2009 2nd International Workshop on Electron Devices and Semiconductor Technology, IEDST '09 - Mumbai, India
Duration: Jun 1 2009Jun 2 2009

Publication series

Name2009 2nd International Workshop on Electron Devices and Semiconductor Technology, IEDST '09

Other

Other2009 2nd International Workshop on Electron Devices and Semiconductor Technology, IEDST '09
CountryIndia
CityMumbai
Period6/1/096/2/09

Keywords

  • Ferroelectric thin film
  • MEMS
  • Micromachined acoustic device
  • PZT
  • Ultrasonic transducer

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Ren, T. L., Chen, H., Yang, Y., Zhu, Y. P., Fu, D., Wang, C., Wu, X. M., Cai, J., Liu, L. T., & Li, Z. J. (2009). Micromachined piezoelectric acoustic device. In 2009 2nd International Workshop on Electron Devices and Semiconductor Technology, IEDST '09 [5166095] (2009 2nd International Workshop on Electron Devices and Semiconductor Technology, IEDST '09). https://doi.org/10.1109/EDST.2009.5166095