Micromachined piezoelectric acoustic device

Tian Ling Ren; Hao Chen; Yi Yang; Yi Ping Zhu; Di Fu; Chao Wang; Xiao Ming Wu; Jian Cai; Li Tian Liu; Zhi Jian Li

doi:10.1109/EDST.2009.5166095

Micromachined piezoelectric acoustic device

Tian Ling Ren, Hao Chen, Yi Yang, Yi Ping Zhu, Di Fu, Chao Wang, Xiao Ming Wu, Jian Cai, Li Tian Liu, Zhi Jian Li

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

9 Scopus citations

Abstract

Micromachined technology has been widely used to reduce device size and improve performance. In this paper, our research activities on micromachined piezoelectric acoustic devices at wide frequency range, from audio microphones to ultrasonic transducers, are reviewed. These devices are based on ferroelectric thin films, and exceed the conventional acoustic devices in excellent performance, miniaturized size, high reliability and compatibility with conventional integrated circuit fabrication. Resonance frequency can be determined by the thickness of each layer composing the thin film. Compact arrays of these devices are designed, fabricated and characterized to enhance sensitivity and pointing. Micromachined acoustic devices could find extensive applications in practical systems.

Original language	English (US)
Title of host publication	2009 2nd International Workshop on Electron Devices and Semiconductor Technology, IEDST '09
DOIs	https://doi.org/10.1109/EDST.2009.5166095
State	Published - Dec 1 2009
Externally published	Yes
Event	2009 2nd International Workshop on Electron Devices and Semiconductor Technology, IEDST '09 - Mumbai, India Duration: Jun 1 2009 → Jun 2 2009

Publication series

Name	2009 2nd International Workshop on Electron Devices and Semiconductor Technology, IEDST '09

Other

Other	2009 2nd International Workshop on Electron Devices and Semiconductor Technology, IEDST '09
Country/Territory	India
City	Mumbai
Period	6/1/09 → 6/2/09

Keywords

Ferroelectric thin film
MEMS
Micromachined acoustic device
PZT
Ultrasonic transducer

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/EDST.2009.5166095

Cite this

Ren, T. L., Chen, H., Yang, Y., Zhu, Y. P., Fu, D., Wang, C., Wu, X. M., Cai, J., Liu, L. T., & Li, Z. J. (2009). Micromachined piezoelectric acoustic device. In 2009 2nd International Workshop on Electron Devices and Semiconductor Technology, IEDST '09 Article 5166095 (2009 2nd International Workshop on Electron Devices and Semiconductor Technology, IEDST '09). https://doi.org/10.1109/EDST.2009.5166095

Micromachined piezoelectric acoustic device. / Ren, Tian Ling; Chen, Hao; Yang, Yi et al.
2009 2nd International Workshop on Electron Devices and Semiconductor Technology, IEDST '09. 2009. 5166095 (2009 2nd International Workshop on Electron Devices and Semiconductor Technology, IEDST '09).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ren, TL, Chen, H, Yang, Y, Zhu, YP, Fu, D, Wang, C, Wu, XM, Cai, J, Liu, LT & Li, ZJ 2009, Micromachined piezoelectric acoustic device. in 2009 2nd International Workshop on Electron Devices and Semiconductor Technology, IEDST '09., 5166095, 2009 2nd International Workshop on Electron Devices and Semiconductor Technology, IEDST '09, 2009 2nd International Workshop on Electron Devices and Semiconductor Technology, IEDST '09, Mumbai, India, 6/1/09. https://doi.org/10.1109/EDST.2009.5166095

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title = "Micromachined piezoelectric acoustic device",

abstract = "Micromachined technology has been widely used to reduce device size and improve performance. In this paper, our research activities on micromachined piezoelectric acoustic devices at wide frequency range, from audio microphones to ultrasonic transducers, are reviewed. These devices are based on ferroelectric thin films, and exceed the conventional acoustic devices in excellent performance, miniaturized size, high reliability and compatibility with conventional integrated circuit fabrication. Resonance frequency can be determined by the thickness of each layer composing the thin film. Compact arrays of these devices are designed, fabricated and characterized to enhance sensitivity and pointing. Micromachined acoustic devices could find extensive applications in practical systems.",

keywords = "Ferroelectric thin film, MEMS, Micromachined acoustic device, PZT, Ultrasonic transducer",

author = "Ren, {Tian Ling} and Hao Chen and Yi Yang and Zhu, {Yi Ping} and Di Fu and Chao Wang and Wu, {Xiao Ming} and Jian Cai and Liu, {Li Tian} and Li, {Zhi Jian}",

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AU - Wu, Xiao Ming

AU - Cai, Jian

AU - Liu, Li Tian

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AB - Micromachined technology has been widely used to reduce device size and improve performance. In this paper, our research activities on micromachined piezoelectric acoustic devices at wide frequency range, from audio microphones to ultrasonic transducers, are reviewed. These devices are based on ferroelectric thin films, and exceed the conventional acoustic devices in excellent performance, miniaturized size, high reliability and compatibility with conventional integrated circuit fabrication. Resonance frequency can be determined by the thickness of each layer composing the thin film. Compact arrays of these devices are designed, fabricated and characterized to enhance sensitivity and pointing. Micromachined acoustic devices could find extensive applications in practical systems.

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Micromachined piezoelectric acoustic device

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Keywords

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