Microfluidic mixer and transporter based on PZT self-focusing acoustic transducers

Hongyu Yu, Jae Wan Kwon, Eun Sok Kim

Research output: Contribution to journalArticle

32 Citations (Scopus)

Abstract

This paper describes noninvasive acoustic micromixer and transporter as well as a microfluidic subsystem (on a single silicon chip) based on the two microfluidic actuators. The actuators use a piezoelectric PZT sheet to generate about 10-12.5MHz acoustic waves (corresponding to the PZT thickness), an array of sectored Fresnel annular rings [for the electrodes sandwiching the piezoelectric transducer (PZT)] to self-focus the acoustic waves, and acoustic streaming effect to produce a body force for fluidic motion. The self-focused waves from the PZT array propagate through 200-μm-thick silicon without any significant energy loss, and move the liquid contained in the channels and chambers (without a cover) on a micromachined silicon chip, up to 123 mm/s in-plane speed. The PZT array (consisting of a PZT sheet with an array of electrode patterns for sectored Fresnel rings) is bonded to the micromachined silicon chip to produce a fast in-plane liquid motion in the open channels and chambers. When the liquid motion is produced in a channel, we have a liquid transporter; while when the motion is produced in a large area chamber, we have a micromixer. Various channel and chamber structures have been fabricated to verify the efficacies of the liquid transport and mixing. A microfluidic subsystem integrating a micromixer, transporters and reservoirs has been shown to transport two types of liquids from their reservoirs to a mixer and to mix the liquids together within 2 s. The experimental results agree well with theoretical studies and simulation results.

Original languageEnglish (US)
Pages (from-to)1015-1024
Number of pages10
JournalJournal of Microelectromechanical Systems
Volume15
Issue number4
DOIs
StatePublished - Aug 2006
Externally publishedYes

Fingerprint

Acoustic transducers
Piezoelectric transducers
Microfluidics
Liquids
Silicon
Actuators
Acoustic streaming
Acoustic waves
Electrodes
Fluidics
Energy dissipation
Acoustics

Keywords

  • Acoustic ejector
  • Fresnel rings
  • Liquid transporter
  • Micromixer
  • Micropump
  • Piezoelectric transducer (PZT)
  • Self focusing

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Microfluidic mixer and transporter based on PZT self-focusing acoustic transducers. / Yu, Hongyu; Kwon, Jae Wan; Kim, Eun Sok.

In: Journal of Microelectromechanical Systems, Vol. 15, No. 4, 08.2006, p. 1015-1024.

Research output: Contribution to journalArticle

Yu, Hongyu ; Kwon, Jae Wan ; Kim, Eun Sok. / Microfluidic mixer and transporter based on PZT self-focusing acoustic transducers. In: Journal of Microelectromechanical Systems. 2006 ; Vol. 15, No. 4. pp. 1015-1024.
@article{ce37e379a2214f5e99bea92cbff5ed57,
title = "Microfluidic mixer and transporter based on PZT self-focusing acoustic transducers",
abstract = "This paper describes noninvasive acoustic micromixer and transporter as well as a microfluidic subsystem (on a single silicon chip) based on the two microfluidic actuators. The actuators use a piezoelectric PZT sheet to generate about 10-12.5MHz acoustic waves (corresponding to the PZT thickness), an array of sectored Fresnel annular rings [for the electrodes sandwiching the piezoelectric transducer (PZT)] to self-focus the acoustic waves, and acoustic streaming effect to produce a body force for fluidic motion. The self-focused waves from the PZT array propagate through 200-μm-thick silicon without any significant energy loss, and move the liquid contained in the channels and chambers (without a cover) on a micromachined silicon chip, up to 123 mm/s in-plane speed. The PZT array (consisting of a PZT sheet with an array of electrode patterns for sectored Fresnel rings) is bonded to the micromachined silicon chip to produce a fast in-plane liquid motion in the open channels and chambers. When the liquid motion is produced in a channel, we have a liquid transporter; while when the motion is produced in a large area chamber, we have a micromixer. Various channel and chamber structures have been fabricated to verify the efficacies of the liquid transport and mixing. A microfluidic subsystem integrating a micromixer, transporters and reservoirs has been shown to transport two types of liquids from their reservoirs to a mixer and to mix the liquids together within 2 s. The experimental results agree well with theoretical studies and simulation results.",
keywords = "Acoustic ejector, Fresnel rings, Liquid transporter, Micromixer, Micropump, Piezoelectric transducer (PZT), Self focusing",
author = "Hongyu Yu and Kwon, {Jae Wan} and Kim, {Eun Sok}",
year = "2006",
month = "8",
doi = "10.1109/JMEMS.2006.878890",
language = "English (US)",
volume = "15",
pages = "1015--1024",
journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "4",

}

TY - JOUR

T1 - Microfluidic mixer and transporter based on PZT self-focusing acoustic transducers

AU - Yu, Hongyu

AU - Kwon, Jae Wan

AU - Kim, Eun Sok

PY - 2006/8

Y1 - 2006/8

N2 - This paper describes noninvasive acoustic micromixer and transporter as well as a microfluidic subsystem (on a single silicon chip) based on the two microfluidic actuators. The actuators use a piezoelectric PZT sheet to generate about 10-12.5MHz acoustic waves (corresponding to the PZT thickness), an array of sectored Fresnel annular rings [for the electrodes sandwiching the piezoelectric transducer (PZT)] to self-focus the acoustic waves, and acoustic streaming effect to produce a body force for fluidic motion. The self-focused waves from the PZT array propagate through 200-μm-thick silicon without any significant energy loss, and move the liquid contained in the channels and chambers (without a cover) on a micromachined silicon chip, up to 123 mm/s in-plane speed. The PZT array (consisting of a PZT sheet with an array of electrode patterns for sectored Fresnel rings) is bonded to the micromachined silicon chip to produce a fast in-plane liquid motion in the open channels and chambers. When the liquid motion is produced in a channel, we have a liquid transporter; while when the motion is produced in a large area chamber, we have a micromixer. Various channel and chamber structures have been fabricated to verify the efficacies of the liquid transport and mixing. A microfluidic subsystem integrating a micromixer, transporters and reservoirs has been shown to transport two types of liquids from their reservoirs to a mixer and to mix the liquids together within 2 s. The experimental results agree well with theoretical studies and simulation results.

AB - This paper describes noninvasive acoustic micromixer and transporter as well as a microfluidic subsystem (on a single silicon chip) based on the two microfluidic actuators. The actuators use a piezoelectric PZT sheet to generate about 10-12.5MHz acoustic waves (corresponding to the PZT thickness), an array of sectored Fresnel annular rings [for the electrodes sandwiching the piezoelectric transducer (PZT)] to self-focus the acoustic waves, and acoustic streaming effect to produce a body force for fluidic motion. The self-focused waves from the PZT array propagate through 200-μm-thick silicon without any significant energy loss, and move the liquid contained in the channels and chambers (without a cover) on a micromachined silicon chip, up to 123 mm/s in-plane speed. The PZT array (consisting of a PZT sheet with an array of electrode patterns for sectored Fresnel rings) is bonded to the micromachined silicon chip to produce a fast in-plane liquid motion in the open channels and chambers. When the liquid motion is produced in a channel, we have a liquid transporter; while when the motion is produced in a large area chamber, we have a micromixer. Various channel and chamber structures have been fabricated to verify the efficacies of the liquid transport and mixing. A microfluidic subsystem integrating a micromixer, transporters and reservoirs has been shown to transport two types of liquids from their reservoirs to a mixer and to mix the liquids together within 2 s. The experimental results agree well with theoretical studies and simulation results.

KW - Acoustic ejector

KW - Fresnel rings

KW - Liquid transporter

KW - Micromixer

KW - Micropump

KW - Piezoelectric transducer (PZT)

KW - Self focusing

UR - http://www.scopus.com/inward/record.url?scp=33747385013&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33747385013&partnerID=8YFLogxK

U2 - 10.1109/JMEMS.2006.878890

DO - 10.1109/JMEMS.2006.878890

M3 - Article

AN - SCOPUS:33747385013

VL - 15

SP - 1015

EP - 1024

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 4

ER -