Microfabricated tuning fork temperature and infrared sensor

Francis Tsow; Nongjian Tao

doi:10.1063/1.2731313

Microfabricated tuning fork temperature and infrared sensor

Francis Tsow, Nongjian Tao

Research output: Contribution to journal › Article › peer-review

20 Scopus citations

Abstract

The authors demonstrated a microfabricated tuning fork temperature/infrared sensor with noise equivalent temperature difference (NETD) of 0.5 mK at 20 °C and with a thermal limited noise level of 5 μ°C. The sensor raw material can cost less than 10 cents each and has a time constant of approximately 50 ms. The sensitivity of infrared signal can potentially be further improved and optimized by selecting polymer materials with a proper thermal response.

Original language	English (US)
Article number	174102
Journal	Applied Physics Letters
Volume	90
Issue number	17
DOIs	https://doi.org/10.1063/1.2731313
State	Published - 2007

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.2731313

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title = "Microfabricated tuning fork temperature and infrared sensor",

abstract = "The authors demonstrated a microfabricated tuning fork temperature/infrared sensor with noise equivalent temperature difference (NETD) of 0.5 mK at 20 °C and with a thermal limited noise level of 5 μ°C. The sensor raw material can cost less than 10 cents each and has a time constant of approximately 50 ms. The sensitivity of infrared signal can potentially be further improved and optimized by selecting polymer materials with a proper thermal response.",

author = "Francis Tsow and Nongjian Tao",

note = "Funding Information: The authors would like to thank Erica Forzani for her help in various ways, Su Lin for her help in making various laser measurements along with plenty helpful discussions, Peiming Zhang for letting us use the FTIR machine in addition to useful discussions, and DOE (DE-FG03-01ER 45943) for financial support. ",

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AU - Tao, Nongjian

N1 - Funding Information: The authors would like to thank Erica Forzani for her help in various ways, Su Lin for her help in making various laser measurements along with plenty helpful discussions, Peiming Zhang for letting us use the FTIR machine in addition to useful discussions, and DOE (DE-FG03-01ER 45943) for financial support.

PY - 2007

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N2 - The authors demonstrated a microfabricated tuning fork temperature/infrared sensor with noise equivalent temperature difference (NETD) of 0.5 mK at 20 °C and with a thermal limited noise level of 5 μ°C. The sensor raw material can cost less than 10 cents each and has a time constant of approximately 50 ms. The sensitivity of infrared signal can potentially be further improved and optimized by selecting polymer materials with a proper thermal response.

AB - The authors demonstrated a microfabricated tuning fork temperature/infrared sensor with noise equivalent temperature difference (NETD) of 0.5 mK at 20 °C and with a thermal limited noise level of 5 μ°C. The sensor raw material can cost less than 10 cents each and has a time constant of approximately 50 ms. The sensitivity of infrared signal can potentially be further improved and optimized by selecting polymer materials with a proper thermal response.

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Microfabricated tuning fork temperature and infrared sensor

Abstract

ASJC Scopus subject areas

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