Abstract

The authors demonstrated a microfabricated tuning fork temperature/infrared sensor with noise equivalent temperature difference (NETD) of 0.5 mK at 20 °C and with a thermal limited noise level of 5 μ°C. The sensor raw material can cost less than 10 cents each and has a time constant of approximately 50 ms. The sensitivity of infrared signal can potentially be further improved and optimized by selecting polymer materials with a proper thermal response.

Original languageEnglish (US)
Article number174102
JournalApplied Physics Letters
Volume90
Issue number17
DOIs
StatePublished - May 21 2007

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ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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