Abstract

The authors demonstrated a microfabricated tuning fork temperature/infrared sensor with noise equivalent temperature difference (NETD) of 0.5 mK at 20 °C and with a thermal limited noise level of 5 μ°C. The sensor raw material can cost less than 10 cents each and has a time constant of approximately 50 ms. The sensitivity of infrared signal can potentially be further improved and optimized by selecting polymer materials with a proper thermal response.

Original languageEnglish (US)
Article number174102
JournalApplied Physics Letters
Volume90
Issue number17
DOIs
StatePublished - 2007

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forks
temperature sensors
tuning
sensors
time constant
temperature gradients
costs
sensitivity
polymers
temperature

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Microfabricated tuning fork temperature and infrared sensor. / Tsow, Francis; Tao, Nongjian.

In: Applied Physics Letters, Vol. 90, No. 17, 174102, 2007.

Research output: Contribution to journalArticle

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abstract = "The authors demonstrated a microfabricated tuning fork temperature/infrared sensor with noise equivalent temperature difference (NETD) of 0.5 mK at 20 °C and with a thermal limited noise level of 5 μ°C. The sensor raw material can cost less than 10 cents each and has a time constant of approximately 50 ms. The sensitivity of infrared signal can potentially be further improved and optimized by selecting polymer materials with a proper thermal response.",
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