Micro Torque Measurement Using Outer-Rotor Polysilicon Micromotors

Kevin C. Stark, A. Azzam Yasseen, Stephen Phillips, Mehran Mehregany

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

Polysilicon surface micromachining using polysilicon for the structural material, silicon nitride or silicon dioxide for electrical isolation, and silicon dioxide for the sacrificial material, has formed the technology base for the development of class of electrostatic micro-actuators. Polysilicon surface micromachining has also been used to implement rotary micromotors. Design and fabrication of outer-rotor micromotors, and micro torque measurement utilizing mechanically-coupled outer-rotor micromotors is presented.

Original languageEnglish (US)
Title of host publicationProceedings of IEEE Sensors
Pages1751-1756
Number of pages6
Volume1
Edition2
StatePublished - 2002
Externally publishedYes
EventFirst IEEE International Conference on Sensors - IEEE Sensors 2002 - Orlando, FL, United States
Duration: Jun 12 2002Jun 14 2002

Other

OtherFirst IEEE International Conference on Sensors - IEEE Sensors 2002
CountryUnited States
CityOrlando, FL
Period6/12/026/14/02

Keywords

  • Micro torque
  • Micromotor
  • Polysilicon actuator

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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  • Cite this

    Stark, K. C., Yasseen, A. A., Phillips, S., & Mehregany, M. (2002). Micro Torque Measurement Using Outer-Rotor Polysilicon Micromotors. In Proceedings of IEEE Sensors (2 ed., Vol. 1, pp. 1751-1756)