TY - JOUR
T1 - Micro-patterning and characterization of PHEMA-co-PAM-based optical chemical sensors for lab-on-a-chip applications
AU - Zhu, Haixin
AU - Zhou, Xianfeng
AU - Su, Fengyu
AU - Tian, Yanqing
AU - Ashili, Shashanka
AU - Holl, Mark R.
AU - Meldrum, Deirdre
N1 - Funding Information:
This work was supported by a grant from the NIH National Human Genome Research Institute , Centers of Excellence in Genomic Science, Grant Number 5 P50 HG002360 , D. Meldrum (PI). The authors would like to thank Yasar Papa, Nada Latthiwan for the help on the microfabrication process, Dr. Liqiang Zhang for the help on the sensor characterization and Jeff Houkal for help on the manuscript editing.
PY - 2012/10
Y1 - 2012/10
N2 - We report a novel method for wafer level, high throughput optical chemical sensor patterning, with precise control of the sensor volume and capability of producing arbitrary microscale patterns. Monomeric oxygen (O 2) and pH optical probes were polymerized with 2-hydroxyethyl methacrylate (HEMA) and acrylamide (AM) to form spin-coatable and further crosslinkable polymers. A micro-patterning method based on micro-fabrication techniques (photolithography, wet chemical process and reactive ion etch) was developed to miniaturize the sensor film onto glass substrates in arbitrary sizes and shapes. The sensitivity of fabricated micro-patterns was characterized under various oxygen concentrations and pH values. The process for spatially integration of two sensors (oxygen and pH) on the same substrate surface was also developed, and preliminary fabrication and characterization results were presented. To the best of our knowledge, it is the first time that poly(2-hydroxylethyl methacrylate)-co-poly(acrylamide) (PHEMA-co-PAM)-based sensors had been patterned and integrated at the wafer level with micron scale precision control using microfabrication techniques. The developed methods can provide a feasible way to miniaturize and integrate the optical chemical sensor system and can be applied to any lab-on-a-chip system, especially the biological micro-systems requiring optical sensing of single or multiple analytes.
AB - We report a novel method for wafer level, high throughput optical chemical sensor patterning, with precise control of the sensor volume and capability of producing arbitrary microscale patterns. Monomeric oxygen (O 2) and pH optical probes were polymerized with 2-hydroxyethyl methacrylate (HEMA) and acrylamide (AM) to form spin-coatable and further crosslinkable polymers. A micro-patterning method based on micro-fabrication techniques (photolithography, wet chemical process and reactive ion etch) was developed to miniaturize the sensor film onto glass substrates in arbitrary sizes and shapes. The sensitivity of fabricated micro-patterns was characterized under various oxygen concentrations and pH values. The process for spatially integration of two sensors (oxygen and pH) on the same substrate surface was also developed, and preliminary fabrication and characterization results were presented. To the best of our knowledge, it is the first time that poly(2-hydroxylethyl methacrylate)-co-poly(acrylamide) (PHEMA-co-PAM)-based sensors had been patterned and integrated at the wafer level with micron scale precision control using microfabrication techniques. The developed methods can provide a feasible way to miniaturize and integrate the optical chemical sensor system and can be applied to any lab-on-a-chip system, especially the biological micro-systems requiring optical sensing of single or multiple analytes.
KW - Lab-on-a-chip
KW - Microfabrication
KW - Optical chemical sensor
KW - PHEMA
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U2 - 10.1016/j.snb.2012.07.101
DO - 10.1016/j.snb.2012.07.101
M3 - Article
AN - SCOPUS:84867035038
SN - 0925-4005
VL - 173
SP - 817
EP - 823
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
ER -