Micro-brush press-on contact: A new technique for room temperature electrical and mechanical attachment

Sang Hyun Lee, Junseok Chae, Navid Yazdi, Khalil Najafi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Scopus citations

Abstract

This paper reports a new technique called "micro-brush" for easy mechanical attachment and electrical interconnection between two parts. Each of the two parts can be either a single die or a full wafer. They can be attached together in selected areas containing the "micro-brushe" by simply "pressing" them together. Each micro-brush is a large array of hair-like high-aspect-ratio metal posts. When pressed together, these metal posts bend and get engaged with others from the opposite side, creating a permanent electrical and mechanical contact, all done at room temperature. High-aspect-ratio arrays of metal posts are fabricated with an areal density of ∼ 2,700,000 per cm2. The metal posts can be optionally coated with solder. Test structures have been fabricated and demonstrated mechanical and electrical attachment.

Original languageEnglish (US)
Title of host publication19th IEEE International Conference on Micro Electro Mechanical Systems
Pages342-345
Number of pages4
StatePublished - Oct 24 2006
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
Duration: Jan 22 2006Jan 26 2006

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2006
ISSN (Print)1084-6999

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
CountryTurkey
CityIstanbul
Period1/22/061/26/06

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Lee, S. H., Chae, J., Yazdi, N., & Najafi, K. (2006). Micro-brush press-on contact: A new technique for room temperature electrical and mechanical attachment. In 19th IEEE International Conference on Micro Electro Mechanical Systems (pp. 342-345). [1627806] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2006).