Method to measure spatial coherence of subangstrom electron beams

Christian Dwyer, Rolf Erni, Joanne Etheridge

Research output: Contribution to journalArticle

38 Scopus citations

Abstract

A method is described for measuring the intensity distribution of the electron source in a scanning transmission electron microscope (STEM) fitted with an objective lens aberration corrector. The method is applied to a C s -corrected 300 kV field emission gun TEM/STEM, which is found to have an effective source size of 0.56 Å full width at half maximum (FWHM) under optical conditions suitable for high resolution STEM imaging. This corresponds to a probe intensity distribution at the specimen plane of 0.72 Å FWHM using a probe-forming aperture of 25 mrad and including the measured residual lens aberrations.

Original languageEnglish (US)
Article number021115
JournalApplied Physics Letters
Volume93
Issue number2
DOIs
StatePublished - Jul 14 2008
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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