Method to measure spatial coherence of subangstrom electron beams

Christian Dwyer, Rolf Erni, Joanne Etheridge

Research output: Contribution to journalArticle

38 Citations (Scopus)

Abstract

A method is described for measuring the intensity distribution of the electron source in a scanning transmission electron microscope (STEM) fitted with an objective lens aberration corrector. The method is applied to a C s -corrected 300 kV field emission gun TEM/STEM, which is found to have an effective source size of 0.56 Å full width at half maximum (FWHM) under optical conditions suitable for high resolution STEM imaging. This corresponds to a probe intensity distribution at the specimen plane of 0.72 Å FWHM using a probe-forming aperture of 25 mrad and including the measured residual lens aberrations.

Original languageEnglish (US)
Article number021115
JournalApplied Physics Letters
Volume93
Issue number2
DOIs
StatePublished - Jul 14 2008
Externally publishedYes

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electron microscopes
electron beams
scanning
aberration
lenses
electron sources
probes
field emission
apertures
transmission electron microscopy
high resolution

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Method to measure spatial coherence of subangstrom electron beams. / Dwyer, Christian; Erni, Rolf; Etheridge, Joanne.

In: Applied Physics Letters, Vol. 93, No. 2, 021115, 14.07.2008.

Research output: Contribution to journalArticle

@article{3aa153c277c1451dacdae2ac9212e67e,
title = "Method to measure spatial coherence of subangstrom electron beams",
abstract = "A method is described for measuring the intensity distribution of the electron source in a scanning transmission electron microscope (STEM) fitted with an objective lens aberration corrector. The method is applied to a C s -corrected 300 kV field emission gun TEM/STEM, which is found to have an effective source size of 0.56 {\AA} full width at half maximum (FWHM) under optical conditions suitable for high resolution STEM imaging. This corresponds to a probe intensity distribution at the specimen plane of 0.72 {\AA} FWHM using a probe-forming aperture of 25 mrad and including the measured residual lens aberrations.",
author = "Christian Dwyer and Rolf Erni and Joanne Etheridge",
year = "2008",
month = "7",
day = "14",
doi = "10.1063/1.2957648",
language = "English (US)",
volume = "93",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "2",

}

TY - JOUR

T1 - Method to measure spatial coherence of subangstrom electron beams

AU - Dwyer, Christian

AU - Erni, Rolf

AU - Etheridge, Joanne

PY - 2008/7/14

Y1 - 2008/7/14

N2 - A method is described for measuring the intensity distribution of the electron source in a scanning transmission electron microscope (STEM) fitted with an objective lens aberration corrector. The method is applied to a C s -corrected 300 kV field emission gun TEM/STEM, which is found to have an effective source size of 0.56 Å full width at half maximum (FWHM) under optical conditions suitable for high resolution STEM imaging. This corresponds to a probe intensity distribution at the specimen plane of 0.72 Å FWHM using a probe-forming aperture of 25 mrad and including the measured residual lens aberrations.

AB - A method is described for measuring the intensity distribution of the electron source in a scanning transmission electron microscope (STEM) fitted with an objective lens aberration corrector. The method is applied to a C s -corrected 300 kV field emission gun TEM/STEM, which is found to have an effective source size of 0.56 Å full width at half maximum (FWHM) under optical conditions suitable for high resolution STEM imaging. This corresponds to a probe intensity distribution at the specimen plane of 0.72 Å FWHM using a probe-forming aperture of 25 mrad and including the measured residual lens aberrations.

UR - http://www.scopus.com/inward/record.url?scp=47549101403&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=47549101403&partnerID=8YFLogxK

U2 - 10.1063/1.2957648

DO - 10.1063/1.2957648

M3 - Article

AN - SCOPUS:47549101403

VL - 93

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 2

M1 - 021115

ER -