Method to measure spatial coherence of subangstrom electron beams

Christian Dwyer; Rolf Erni; Joanne Etheridge

doi:10.1063/1.2957648

Method to measure spatial coherence of subangstrom electron beams

Christian Dwyer, Rolf Erni, Joanne Etheridge

Research output: Contribution to journal › Article › peer-review

44 Scopus citations

Abstract

A method is described for measuring the intensity distribution of the electron source in a scanning transmission electron microscope (STEM) fitted with an objective lens aberration corrector. The method is applied to a C _s -corrected 300 kV field emission gun TEM/STEM, which is found to have an effective source size of 0.56 Å full width at half maximum (FWHM) under optical conditions suitable for high resolution STEM imaging. This corresponds to a probe intensity distribution at the specimen plane of 0.72 Å FWHM using a probe-forming aperture of 25 mrad and including the measured residual lens aberrations.

Original language	English (US)
Article number	021115
Journal	Applied Physics Letters
Volume	93
Issue number	2
DOIs	https://doi.org/10.1063/1.2957648
State	Published - Jul 14 2008
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.2957648

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title = "Method to measure spatial coherence of subangstrom electron beams",

abstract = "A method is described for measuring the intensity distribution of the electron source in a scanning transmission electron microscope (STEM) fitted with an objective lens aberration corrector. The method is applied to a C s -corrected 300 kV field emission gun TEM/STEM, which is found to have an effective source size of 0.56 {\AA} full width at half maximum (FWHM) under optical conditions suitable for high resolution STEM imaging. This corresponds to a probe intensity distribution at the specimen plane of 0.72 {\AA} FWHM using a probe-forming aperture of 25 mrad and including the measured residual lens aberrations.",

author = "Christian Dwyer and Rolf Erni and Joanne Etheridge",

note = "Funding Information: The authors are most grateful to FEI Company for providing access to a Titan FEG-TEM, and to Dr. P. Tiemeijer and Dr. P. Nakashima for measurement of the CCD modulation transfer function. R.E. acknowledges support by the U.S. Department of Energy under Contract No. DE-AC02-05CH11231. J.E. acknowledges support by the Australian Research Council (Grant DP0346828).",

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doi = "10.1063/1.2957648",

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T1 - Method to measure spatial coherence of subangstrom electron beams

AU - Dwyer, Christian

AU - Erni, Rolf

AU - Etheridge, Joanne

N1 - Funding Information: The authors are most grateful to FEI Company for providing access to a Titan FEG-TEM, and to Dr. P. Tiemeijer and Dr. P. Nakashima for measurement of the CCD modulation transfer function. R.E. acknowledges support by the U.S. Department of Energy under Contract No. DE-AC02-05CH11231. J.E. acknowledges support by the Australian Research Council (Grant DP0346828).

PY - 2008/7/14

Y1 - 2008/7/14

N2 - A method is described for measuring the intensity distribution of the electron source in a scanning transmission electron microscope (STEM) fitted with an objective lens aberration corrector. The method is applied to a C s -corrected 300 kV field emission gun TEM/STEM, which is found to have an effective source size of 0.56 Å full width at half maximum (FWHM) under optical conditions suitable for high resolution STEM imaging. This corresponds to a probe intensity distribution at the specimen plane of 0.72 Å FWHM using a probe-forming aperture of 25 mrad and including the measured residual lens aberrations.

AB - A method is described for measuring the intensity distribution of the electron source in a scanning transmission electron microscope (STEM) fitted with an objective lens aberration corrector. The method is applied to a C s -corrected 300 kV field emission gun TEM/STEM, which is found to have an effective source size of 0.56 Å full width at half maximum (FWHM) under optical conditions suitable for high resolution STEM imaging. This corresponds to a probe intensity distribution at the specimen plane of 0.72 Å FWHM using a probe-forming aperture of 25 mrad and including the measured residual lens aberrations.

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Method to measure spatial coherence of subangstrom electron beams

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