Abstract

Incorporating sensors onto a flexible substrate will add functionality to flexible displays. Though several attempts have been made to mount MEMS sensors[l, 2] on flexible substrates[l], none of the sensors have been integrally fabricated on the substrate[3]. Fabricating MEMS sensors on flexible substrates [4] along with display elements will provide new sensing capabilities and enhance functionality. We propose a MEMS capacitive sensor fabricated in a low temperature, flexible amorphous silicon process. This sensor will enable acoustic detection and have potential applications for blast dosimetry [5], a research topic currently of great interest.

Original languageEnglish (US)
Title of host publication2009 Flexible Electronics and Displays Conference and Exhibition, FLEX 2009
DOIs
Publication statusPublished - 2009
EventFlexible Electronics and Displays Conference and Exhibition, FLEX 2009 -
Duration: Feb 2 2009Feb 2 2009

Other

OtherFlexible Electronics and Displays Conference and Exhibition, FLEX 2009
Period2/2/092/2/09

    Fingerprint

Keywords

  • Flexible
  • MEMS
  • Sensor
  • Shock

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Lakamraju, N. V., Phillips, S., Venugopal, S. M., & Allee, D. (2009). MEMS shock sensor fabricated on flexible substrate. In 2009 Flexible Electronics and Displays Conference and Exhibition, FLEX 2009 [5069281] https://doi.org/10.1109/FEDC.2009.5069281