MEMS shear stress sensors for microcirculation

Gopikrishnan Soundararajan, Mahsa Rouhanizadeh, Hongyu Yu, Lucas DeMaio, E. S. Kim, Tzung K. Hsiai

Research output: Contribution to journalArticle

28 Citations (Scopus)

Abstract

Coronary artery disease is the leading cause of morbidity and mortality in the industrialized nations. Both biochemical and biomechanical stimuli modulate the pathogenesis of coronary artery diseases. Shear stress acting on the lumen of blood vessels intimately modulates the biological activities of vascular endothelial cells (ECs). We hereby develop micro electro mechanical system (MEMS)-based sensors at the dimension comparable to a single EC to monitor real-time shear stress in a micro fluidic channel. Our goal is to fabricate sensors for shear stress measurement at low Reynolds number commonly encountered in human microcirculation. The MEMS sensors are designed based on the previously described heat transfer principles. The polysilicon was doped with phosphorous in order to increase the resistivity of the sensing element at 2.5 kω. The development of backside wire bonding enabled the application for the vascular geometry. The small dimension (80 μm μ 2 μm) and the gain amplitude at 71 kHz offers an entry point to measure shear stress with high spatial and temporal resolution.

Original languageEnglish (US)
Pages (from-to)25-32
Number of pages8
JournalSensors and Actuators, A: Physical
Volume118
Issue number1
DOIs
StatePublished - Jan 31 2005
Externally publishedYes

Fingerprint

Microcirculation
shear stress
Shear stress
coronary artery disease
sensors
Endothelial cells
Sensors
pathogenesis
lumens
stress measurement
mortality
blood vessels
fluidics
Stress measurement
Blood vessels
low Reynolds number
Fluidics
activity (biology)
Bioactivity
temporal resolution

Keywords

  • Blood circulation
  • MEMS
  • Shear stress sensor

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Instrumentation

Cite this

Soundararajan, G., Rouhanizadeh, M., Yu, H., DeMaio, L., Kim, E. S., & Hsiai, T. K. (2005). MEMS shear stress sensors for microcirculation. Sensors and Actuators, A: Physical, 118(1), 25-32. https://doi.org/10.1016/j.sna.2004.07.005

MEMS shear stress sensors for microcirculation. / Soundararajan, Gopikrishnan; Rouhanizadeh, Mahsa; Yu, Hongyu; DeMaio, Lucas; Kim, E. S.; Hsiai, Tzung K.

In: Sensors and Actuators, A: Physical, Vol. 118, No. 1, 31.01.2005, p. 25-32.

Research output: Contribution to journalArticle

Soundararajan, G, Rouhanizadeh, M, Yu, H, DeMaio, L, Kim, ES & Hsiai, TK 2005, 'MEMS shear stress sensors for microcirculation', Sensors and Actuators, A: Physical, vol. 118, no. 1, pp. 25-32. https://doi.org/10.1016/j.sna.2004.07.005
Soundararajan G, Rouhanizadeh M, Yu H, DeMaio L, Kim ES, Hsiai TK. MEMS shear stress sensors for microcirculation. Sensors and Actuators, A: Physical. 2005 Jan 31;118(1):25-32. https://doi.org/10.1016/j.sna.2004.07.005
Soundararajan, Gopikrishnan ; Rouhanizadeh, Mahsa ; Yu, Hongyu ; DeMaio, Lucas ; Kim, E. S. ; Hsiai, Tzung K. / MEMS shear stress sensors for microcirculation. In: Sensors and Actuators, A: Physical. 2005 ; Vol. 118, No. 1. pp. 25-32.
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