MEMS optical position sensor for sun tracking

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

We demonstrate a sun tracking sensor fabricated in the MultiMEMS SensoNor process. The sensor uses a quadrant photodetector to determine the position of a projected shadow. Differential measurement of pairs of photodiodes allows simultaneous dual-axis readings. The sensing structure was manufactured in the commercial MultiMEMS process, so it can be easily reproduced in large quantities. The device was tested from -45° to +45° to verify performance. Results show a linear correlation between a mapped output and angle of incident light with an R2 value of 0.995. The small size, robust structure, and minimal post-processing make it well-suited for sun tracking applications.

Original languageEnglish (US)
Title of host publicationProceedings - IEEE International Symposium on Circuits and Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1874-1878
Number of pages5
Volume2015-July
ISBN (Print)9781479983919
DOIs
StatePublished - Jul 27 2015
EventIEEE International Symposium on Circuits and Systems, ISCAS 2015 - Lisbon, Portugal
Duration: May 24 2015May 27 2015

Other

OtherIEEE International Symposium on Circuits and Systems, ISCAS 2015
CountryPortugal
CityLisbon
Period5/24/155/27/15

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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    Welch, D., & Blain Christen, J. (2015). MEMS optical position sensor for sun tracking. In Proceedings - IEEE International Symposium on Circuits and Systems (Vol. 2015-July, pp. 1874-1878). [7169023] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISCAS.2015.7169023