MEMS-Based testing stage to study electrical and mechanical properties of nanocrystalline metal films

J. Han, J. Rajagopalan, M.T. A. Saif

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Scopus citations
Original languageEnglish
Title of host publicationMEMS-Based testing stage to study electrical and mechanical properties of nanocrystalline metal films
StatePublished - 2007
EventSPIE -
Duration: Jan 1 2007 → …

Conference

ConferenceSPIE
Period1/1/07 → …

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