MEMS accelerometer based on Molecular Electronic Transducers using Ionic Liquid

Mengbing Liang, Hongyu Yu, Miranda Ngan, Stella Nickerson, Elizabeth Nofen, Lenore Dai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

This paper demonstrates a novel MEMS accelerometer based on Molecular Electronic Transducers (MET) using Ionic Liquids (ILs) as sensing body to enable operation in a wide temperature range with better sensitivity. The Sensitivity has been improved for 8 times and the low operation temperature limit expands to at least -90 °C.

Original languageEnglish (US)
Title of host publicationIEEE-NANO 2015 - 15th International Conference on Nanotechnology
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1167-1170
Number of pages4
ISBN (Print)9781467381550
DOIs
StatePublished - Jan 20 2016
Event15th IEEE International Conference on Nanotechnology, IEEE-NANO 2015 - Rome, Italy
Duration: Jul 27 2015Jul 30 2015

Other

Other15th IEEE International Conference on Nanotechnology, IEEE-NANO 2015
Country/TerritoryItaly
CityRome
Period7/27/157/30/15

Keywords

  • Accelerometer
  • Ionic Liquids
  • Molecular Electronic Transducer (MET)

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Electrical and Electronic Engineering
  • Ceramics and Composites
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films

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