MEMS accelerometer based on Molecular Electronic Transducers using Ionic Liquid

Mengbing Liang, Hongyu Yu, Miranda Ngan, Stella Nickerson, Elizabeth Nofen, Lenore Dai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper demonstrates a novel MEMS accelerometer based on Molecular Electronic Transducers (MET) using Ionic Liquids (ILs) as sensing body to enable operation in a wide temperature range with better sensitivity. The Sensitivity has been improved for 8 times and the low operation temperature limit expands to at least -90 °C.

Original languageEnglish (US)
Title of host publicationIEEE-NANO 2015 - 15th International Conference on Nanotechnology
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1167-1170
Number of pages4
ISBN (Print)9781467381550
DOIs
StatePublished - Jan 20 2016
Event15th IEEE International Conference on Nanotechnology, IEEE-NANO 2015 - Rome, Italy
Duration: Jul 27 2015Jul 30 2015

Other

Other15th IEEE International Conference on Nanotechnology, IEEE-NANO 2015
CountryItaly
CityRome
Period7/27/157/30/15

Fingerprint

Low temperature operations
Molecular electronics
Ionic Liquids
Accelerometers
Ionic liquids
MEMS
Transducers
Temperature

Keywords

  • Accelerometer
  • Ionic Liquids
  • Molecular Electronic Transducer (MET)

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Electrical and Electronic Engineering
  • Ceramics and Composites
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films

Cite this

Liang, M., Yu, H., Ngan, M., Nickerson, S., Nofen, E., & Dai, L. (2016). MEMS accelerometer based on Molecular Electronic Transducers using Ionic Liquid. In IEEE-NANO 2015 - 15th International Conference on Nanotechnology (pp. 1167-1170). [7388833] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NANO.2015.7388833

MEMS accelerometer based on Molecular Electronic Transducers using Ionic Liquid. / Liang, Mengbing; Yu, Hongyu; Ngan, Miranda; Nickerson, Stella; Nofen, Elizabeth; Dai, Lenore.

IEEE-NANO 2015 - 15th International Conference on Nanotechnology. Institute of Electrical and Electronics Engineers Inc., 2016. p. 1167-1170 7388833.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Liang, M, Yu, H, Ngan, M, Nickerson, S, Nofen, E & Dai, L 2016, MEMS accelerometer based on Molecular Electronic Transducers using Ionic Liquid. in IEEE-NANO 2015 - 15th International Conference on Nanotechnology., 7388833, Institute of Electrical and Electronics Engineers Inc., pp. 1167-1170, 15th IEEE International Conference on Nanotechnology, IEEE-NANO 2015, Rome, Italy, 7/27/15. https://doi.org/10.1109/NANO.2015.7388833
Liang M, Yu H, Ngan M, Nickerson S, Nofen E, Dai L. MEMS accelerometer based on Molecular Electronic Transducers using Ionic Liquid. In IEEE-NANO 2015 - 15th International Conference on Nanotechnology. Institute of Electrical and Electronics Engineers Inc. 2016. p. 1167-1170. 7388833 https://doi.org/10.1109/NANO.2015.7388833
Liang, Mengbing ; Yu, Hongyu ; Ngan, Miranda ; Nickerson, Stella ; Nofen, Elizabeth ; Dai, Lenore. / MEMS accelerometer based on Molecular Electronic Transducers using Ionic Liquid. IEEE-NANO 2015 - 15th International Conference on Nanotechnology. Institute of Electrical and Electronics Engineers Inc., 2016. pp. 1167-1170
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