MEMS accelerometer based on Molecular Electronic Transducers using Ionic Liquid

Mengbing Liang; Hongyu Yu; Miranda Ngan; Stella Nickerson; Elizabeth Nofen; Lenore Dai

doi:10.1109/NANO.2015.7388833

MEMS accelerometer based on Molecular Electronic Transducers using Ionic Liquid

Mengbing Liang, Hongyu Yu, Miranda Ngan, Stella Nickerson, Elizabeth Nofen, Lenore Dai

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Scopus citations

Abstract

This paper demonstrates a novel MEMS accelerometer based on Molecular Electronic Transducers (MET) using Ionic Liquids (ILs) as sensing body to enable operation in a wide temperature range with better sensitivity. The Sensitivity has been improved for 8 times and the low operation temperature limit expands to at least -90 °C.

Original language	English (US)
Title of host publication	IEEE-NANO 2015 - 15th International Conference on Nanotechnology
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1167-1170
Number of pages	4
ISBN (Print)	9781467381550
DOIs	https://doi.org/10.1109/NANO.2015.7388833
State	Published - Jan 20 2016
Event	15th IEEE International Conference on Nanotechnology, IEEE-NANO 2015 - Rome, Italy Duration: Jul 27 2015 → Jul 30 2015

Other

Other	15th IEEE International Conference on Nanotechnology, IEEE-NANO 2015
Country/Territory	Italy
City	Rome
Period	7/27/15 → 7/30/15

Keywords

Accelerometer
Ionic Liquids
Molecular Electronic Transducer (MET)

ASJC Scopus subject areas

Process Chemistry and Technology
Electrical and Electronic Engineering
Ceramics and Composites
Electronic, Optical and Magnetic Materials
Surfaces, Coatings and Films

Access to Document

10.1109/NANO.2015.7388833

Cite this

MEMS accelerometer based on Molecular Electronic Transducers using Ionic Liquid. / Liang, Mengbing; Yu, Hongyu; Ngan, Miranda et al.
IEEE-NANO 2015 - 15th International Conference on Nanotechnology. Institute of Electrical and Electronics Engineers Inc., 2016. p. 1167-1170 7388833.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Liang, M, Yu, H, Ngan, M, Nickerson, S, Nofen, E & Dai, L 2016, MEMS accelerometer based on Molecular Electronic Transducers using Ionic Liquid. in IEEE-NANO 2015 - 15th International Conference on Nanotechnology., 7388833, Institute of Electrical and Electronics Engineers Inc., pp. 1167-1170, 15th IEEE International Conference on Nanotechnology, IEEE-NANO 2015, Rome, Italy, 7/27/15. https://doi.org/10.1109/NANO.2015.7388833

@inproceedings{7473e246f7cd435aa8be216c462bcbd9,

title = "MEMS accelerometer based on Molecular Electronic Transducers using Ionic Liquid",

abstract = "This paper demonstrates a novel MEMS accelerometer based on Molecular Electronic Transducers (MET) using Ionic Liquids (ILs) as sensing body to enable operation in a wide temperature range with better sensitivity. The Sensitivity has been improved for 8 times and the low operation temperature limit expands to at least -90 °C.",

keywords = "Accelerometer, Ionic Liquids, Molecular Electronic Transducer (MET)",

author = "Mengbing Liang and Hongyu Yu and Miranda Ngan and Stella Nickerson and Elizabeth Nofen and Lenore Dai",

year = "2016",

month = jan,

day = "20",

doi = "10.1109/NANO.2015.7388833",

language = "English (US)",

isbn = "9781467381550",

pages = "1167--1170",

booktitle = "IEEE-NANO 2015 - 15th International Conference on Nanotechnology",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "15th IEEE International Conference on Nanotechnology, IEEE-NANO 2015 ; Conference date: 27-07-2015 Through 30-07-2015",

}

TY - GEN

T1 - MEMS accelerometer based on Molecular Electronic Transducers using Ionic Liquid

AU - Liang, Mengbing

AU - Yu, Hongyu

AU - Ngan, Miranda

AU - Nickerson, Stella

AU - Nofen, Elizabeth

AU - Dai, Lenore

PY - 2016/1/20

Y1 - 2016/1/20

N2 - This paper demonstrates a novel MEMS accelerometer based on Molecular Electronic Transducers (MET) using Ionic Liquids (ILs) as sensing body to enable operation in a wide temperature range with better sensitivity. The Sensitivity has been improved for 8 times and the low operation temperature limit expands to at least -90 °C.

AB - This paper demonstrates a novel MEMS accelerometer based on Molecular Electronic Transducers (MET) using Ionic Liquids (ILs) as sensing body to enable operation in a wide temperature range with better sensitivity. The Sensitivity has been improved for 8 times and the low operation temperature limit expands to at least -90 °C.

KW - Accelerometer

KW - Ionic Liquids

KW - Molecular Electronic Transducer (MET)

UR - http://www.scopus.com/inward/record.url?scp=84964350402&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84964350402&partnerID=8YFLogxK

U2 - 10.1109/NANO.2015.7388833

DO - 10.1109/NANO.2015.7388833

M3 - Conference contribution

AN - SCOPUS:84964350402

SN - 9781467381550

SP - 1167

EP - 1170

BT - IEEE-NANO 2015 - 15th International Conference on Nanotechnology

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 15th IEEE International Conference on Nanotechnology, IEEE-NANO 2015

Y2 - 27 July 2015 through 30 July 2015

ER -

MEMS accelerometer based on Molecular Electronic Transducers using Ionic Liquid

Abstract

Other

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this