Mechanisms of defect formation and growth in oxygen implanted SOI material during thermal ramping and isothermal annealing.

Stephen Krause, C. O. Jung, T. S. Ravi, D. E. Burke

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

To understand the formation and evolution of precipitates and defects the authors have studied structural changes in SIMOX (separation by implantation of oxygen) material annealed at temperatures covering the range from lower temperature thermal ramping through high-temperature isothermal annealing. Precipitates and defects were studied with electron microscopy techniques, including high-resolution imaging. Samples annealed for 2 h at lower temperatures from 700°C to 750°C show no structural changes compared to as-implanted material. Samples annealed at intermediate temperatures from 800°C, to 950°C show a series of unusual structural changes which result in the formation of stacking faults. Initially, at 800°C and 850°C small, 3- to 5-nm precipitates form very close (within 10 to 20 nm) to the wafer surface and generate one or two short {111} stacking faults that run only to the wafer surface. At 900°C and 950°C, the presence of the short stacking faults near the surface enhances oxygen diffusion and causes near-surface precipitates to grow and form new stacking faults that extend downward through the superficial layer. High-temperature annealing, at 1100°C and 1250°C, causes precipitate dissolution and stacking fault stabilization.

Original languageEnglish (US)
Title of host publicationProc 1988 IEEE SIS/SOI Technol Workshop
Pages46
Number of pages1
StatePublished - 1988
EventProceedings of 1988 IEEE SIS/SOI Technology Workshop - St. Simons Island, GA, USA
Duration: Oct 3 1988Oct 5 1988

Other

OtherProceedings of 1988 IEEE SIS/SOI Technology Workshop
CitySt. Simons Island, GA, USA
Period10/3/8810/5/88

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ASJC Scopus subject areas

  • Engineering(all)

Cite this

Krause, S., Jung, C. O., Ravi, T. S., & Burke, D. E. (1988). Mechanisms of defect formation and growth in oxygen implanted SOI material during thermal ramping and isothermal annealing. In Proc 1988 IEEE SIS/SOI Technol Workshop (pp. 46)