Mechanisms of defect formation and growth during thermal ramping and annealing in oxygen implanted silicon-on-insulator material

Stephen Krause, CO Jung, TS Ravi, DE Burke

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Fingerprint

Dive into the research topics of 'Mechanisms of defect formation and growth during thermal ramping and annealing in oxygen implanted silicon-on-insulator material'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds