Mechanism of the SIMS matrix effect

V. R. Deline, William Katz, C. A. Evans, Peter Williams

Research output: Contribution to journalArticle

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Abstract

Quantization of ion microprobe mass spectrometric analyses has been complicated by the variation in the ion yield of an element contained in different matrices. This work demonstrates that, for O- and Cs + bombardment, these ion-yield variations are solely attributable to variations in the matrix sputtering yield. It is argued that the matrix sputtering yield determines the near-surface concentration of the ion-yield-enhancing species O and Cs.

Original languageEnglish (US)
Pages (from-to)832-835
Number of pages4
JournalApplied Physics Letters
Volume33
Issue number9
DOIs
StatePublished - Dec 1 1978
Externally publishedYes

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ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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