Mechanism of the SIMS matrix effect

V. R. Deline, William Katz, C. A. Evans, Peter Williams

Research output: Contribution to journalArticle

162 Scopus citations


Quantization of ion microprobe mass spectrometric analyses has been complicated by the variation in the ion yield of an element contained in different matrices. This work demonstrates that, for O- and Cs + bombardment, these ion-yield variations are solely attributable to variations in the matrix sputtering yield. It is argued that the matrix sputtering yield determines the near-surface concentration of the ion-yield-enhancing species O and Cs.

Original languageEnglish (US)
Pages (from-to)832-835
Number of pages4
JournalApplied Physics Letters
Issue number9
StatePublished - Dec 1 1978
Externally publishedYes


ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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