Mechanical stress effect on imprint behavior of integrated ferroelectric capacitors

A. Gruverman, B. J. Rodriguez, A. I. Kingon, R. J. Nemanich, A. K. Tagantsev, J. S. Cross, M. Tsukada

Research output: Contribution to journalArticlepeer-review

186 Scopus citations

Abstract

A study was performed on mechanical stress effect on imprint behavior of integrated ferroelectric capacitors. The piezoresponse force microscopic technique was used for the purpose. It was found that the mechanical stress caused elastic switching in capacitors.

Original languageEnglish (US)
Pages (from-to)728-730
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number4
DOIs
StatePublished - Jul 28 2003

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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