Abstract
This study uses simulation-based analysis to evaluate the operating practices of a high-volume, multiple-product semiconductor fab, with the goal of finding potential areas for productivity improvement that will yield a quantifiable increase in fab capacity. The parameters setup, batching, tool/operator dedication, lot release, and dispatch rule were studied. The analysis revealed that some of the current operating practices of the factory were beneficial while changing some other practices would increase `cycle-time-constrained capacity' by up to 12%. A significant opportunity for potential improvement for this factory lies in implementing a strict setup avoidance policy. The first implementation in the actual fab is a relaxation of the photolithography equipment dedication which has helped the factory achieve a 25% reduction in cycle time and inventory.
| Original language | English (US) |
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| Title of host publication | IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings |
| Editors | Anon |
| Publisher | IEEE |
| State | Published - 1997 |
| Event | Proceedings of the 1997 IEEE International Symposium on Semiconductor on Manufacturing Conference - San Francisco, CA, USA Duration: Oct 6 1997 → Oct 8 1997 |
Other
| Other | Proceedings of the 1997 IEEE International Symposium on Semiconductor on Manufacturing Conference |
|---|---|
| City | San Francisco, CA, USA |
| Period | 10/6/97 → 10/8/97 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Industrial and Manufacturing Engineering